Prof. Hartmut H. Hillmer Profile

Prof. Hartmut H. Hillmer

Doctor at Univ Kassel

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Author

Publications (37)

Proceedings Article | 15 June 2023 Presentation + Paper

Comparison of different methods to substantially improve the efficiency of filter-based spectroscopic sensors

A. Kobylinskiy, M. Kraus, H. Hillmer, R. Brunner

Proceedings Volume 12516, 125160J (2023) https://doi.org/10.1117/12.2663858

KEYWORDS: Optical filters, Sensors, Spectroscopy, Dichroic mirrors, Beam path, Spectral resolution, Linear filtering

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Proceedings Article | 15 June 2023 Presentation + Paper

Compact cross-grating spectrometer in double-pass configuration: design, implementation, and test

Matthias Kraus, Tobias Hönle, Erik Förster, Robert Brüning, Hartmut Hillmer, Robert Brunner

Proceedings Volume 12516, 1251607 (2023) https://doi.org/10.1117/12.2664010

KEYWORDS: Spectroscopy, Objectives, Spectral resolution, Optical design, Diffraction, Cameras, Design and modelling, Mechanical engineering, Diffraction gratings, Optical gratings

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Proceedings Article | 15 July 2022 Paper

Mesoscale surface patterning by ring-shaped lithography for single and array optical elements

M. Knoblich, M. Kraus, D. Stumpf, E. Förster, L. Werner, H. Hillmer, R. Brunner

Proceedings Volume 12298, 122980D (2022) https://doi.org/10.1117/12.2632159

KEYWORDS: Axicons, Optical components, Lithography, Light sources, Geometrical optics, Photoresist materials, Optical arrays, Aspheric lenses, Optics manufacturing

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SPIE Journal Paper | 21 September 2021 Open Access

Simple but effective: strong efficiency boost for a linear variable filter-based spectrometer

Aliaksei Kobylinskiy, Matthias Kraus, Xavier Uwurukundo, Harmut Hillmer, Robert Brunner

JOM, Vol. 1, Issue 04, 044501, (September 2021) https://doi.org/10.1117/12.10.1117/1.JOM.1.4.044501

KEYWORDS: Beam splitters, Optical filters, Lamps, Spectroscopy, Halogens, Linear filtering, Mirrors, Optical microsystems, CCD image sensors, CCD cameras

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SPIE Journal Paper | 26 January 2021 Open Access

MOEMS micromirror arrays in smart windows for daylight steering

Harmut Hillmer, Mustaqim Siddi Que Iskhandar, Muhammad Kamrul Hasan, Sapida Akhundzada, Basim Al-Qargholi, Andreas Tatzel

JOM, Vol. 1, Issue 01, 014502, (January 2021) https://doi.org/10.1117/12.10.1117/1.JOM.1.1.014502

KEYWORDS: Micromirrors, Microopto electromechanical systems, Mirrors, Electrodes, Reliability, Optical microsystems, Buildings, Camera shutters, Transparent conductors, Light sources and illumination

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Proceedings Article | 26 April 2016 Paper

Influences of edges and steep slopes in 3D interference and confocal microscopy

Weichang Xie, Sebastian Hagemeier, Carsten Woidt, Harmut Hillmer, Peter Lehmann

Proceedings Volume 9890, 98900X (2016) https://doi.org/10.1117/12.2228307

KEYWORDS: Interferometers, Confocal microscopy, 3D metrology, Microscopes, Optical tomography, Tomography, Interferometry, Interferometers, Light emitting diodes, Blue light emitting diodes, Diffraction, Mirau interferometers, Objectives, Imaging systems, Apodization

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Optical measurement techniques are widely applied in high-resolution contour, topography and roughness measurement. In this context vertical scanning white-light interferometers and confocal microscopes have become mature instruments over the last decades. The accuracy of measurement results is highly related not only to the type and physical properties of the measuring instruments, but also to the measurement object itself. This contribution focuses on measurement eﬀects occurring at edges and height steps using white-light interferometers of diﬀerent numerical apertures. If the edge is perfectly perpendicular, batwing eﬀects appear at height steps. These batwings show maximum height if the height-to-wavelength-ratio (HWR) is about one forth or three forth, and they disappear if the HWR value is about an integer multiple of one half. The wavelength that is relevant in this context is the eﬀective wavelength, i.e. the center wavelength of the illuminating light multiplied by a correction factor known as the numerical aperture correction. However, in practice the edges are usually not perfectly perpendicular. In this case, the measurement results depend also on the derivative of the surface height function and they may diﬀer from theory and the prediction according to the HWR value. Measurements of such steps show systematical eﬀects depending on the lateral resolution of the instrument. In this context, a Linnik interferometer with a magniﬁcation of 100x and NA = 0.9 is used to characterize the three dimensional topography of more or less rectangular calibration specimens and quasi-perpendicular structures produced by the nanoimprint technology. The Linnik interferometer is equipped with LED light sources emitting at diﬀerent wavelengths, so that the HWR value can be changed. This is possible since the high NA objective lenses show a rather limited depth of focus such that the temporal coherence gating may be replaced by focal gating in this particular instrument. In addition, measurement results are compared with those achieved by a Mirau interferometer of NA = 0.55. A commercial confocal microscope with NA of 0.95 serves as a reference instrument for further comparison. Numerical simulations considering diﬀraction eﬀects are carried out in order to explain the experimental results obtained by the diﬀerent white and colored light interferometers

Proceedings Article | 2 May 2014 Paper

Temporally shaped femtosecond laser pulses as direct patterning method for dielectric materials in nanophotonic applications

Tamara Meinl, Nadine Götte, Yousuf Khan, Thomas Kusserow, Cristian Sarpe, Jens Köhler, Matthias Wollenhaupt, Arne Senftleben, Thomas Baumert, Harmut Hillmer

Proceedings Volume 9126, 91262B (2014) https://doi.org/10.1117/12.2051749

KEYWORDS: Dielectrics, Waveguides, Femtosecond phenomena, Electron beam lithography, Optical filters, Refractive index, Photonic crystals, Laser processing, Pulsed laser operation, Nanophotonics

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SPIE Journal Paper | 1 October 2010

Characterization of dry etching of TiO₂/SiO₂ distributed Bragg reflectors for tunable optical sensor arrays

Onny Setyawati, Markus Engenhorst, Martin Bartels, Vadim Daneker, Stefan Wittzack, Tatjana Woit, Florestan Köhler, Harmut Hillmer

JM3, Vol. 9, Issue 04, 041110, (October 2010) https://doi.org/10.1117/12.10.1117/1.3524828

KEYWORDS: Etching, Mirrors, Dry etching, Photomasks, Reactive ion etching, Photoresist materials, Distributed Bragg reflectors, Optical filters, Plasma, Ions

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Proceedings Article | 14 May 2010 Paper

Investigation of CMOS photodiodes integrated on an ASIC by a 0.5-µm analog CMOS process

H. Luo, U. Ricklefs, H. Hillmer

Proceedings Volume 7726, 772624 (2010) https://doi.org/10.1117/12.854660

KEYWORDS: Photodiodes, Diffusion, Diodes, CMOS technology, Signal processing, Standards development, Analog electronics, Image sensors, Silicon, Sensors

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Proceedings Article | 16 February 2010 Paper

Dry etching of TiO2/SiO2 DBR mirrors for tunable optical sensor arrays

O. Setyawati, M. Engenhorst, S. Wittzack, F. Köhler, C. Woidt, T. Woit, V. Daneker, M. Bartels, H. Hillmer

Proceedings Volume 7591, 75910R (2010) https://doi.org/10.1117/12.841881

KEYWORDS: Etching, Mirrors, Reactive ion etching, Argon, Optical sensors, Optical arrays, Scanning electron microscopy, Silica, Dry etching, Titanium dioxide

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Proceedings Article | 19 May 2009 Paper

Design and fabrication of self-assembling micromirror arrays

Qingdang Li, Andreas Jäkel, Volker Viereck, Jürgen Schmid, Hartmut Hillmer

Proceedings Volume 7362, 736211 (2009) https://doi.org/10.1117/12.821686

KEYWORDS: Micromirrors, Mirrors, Metals, Electrodes, Glasses, Microelectromechanical systems, Sensors, Aluminum, Sun, Sensor networks

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Proceedings Article | 8 May 2008 Paper

RIN spectra of a two-mode lasing two-section DFB laser for optical sensor application

Hubert Krause, Julian Sonksen, Jürgen Baumann, Ute Troppenz, Wolfgang Rehbein, Volker Viereck, Hartmut Hillmer

Proceedings Volume 6997, 699722 (2008) https://doi.org/10.1117/12.781139

KEYWORDS: Semiconductor lasers, Absorption, Laser optics, Independent component analysis, Fiber lasers, Optical sensors, Photoacoustic spectroscopy, Spectroscopy, Spectrum analysis, Camera shutters

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Proceedings Article | 25 April 2008 Paper

Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices

T. Kusserow, S. Ferwana, T. Nakamura, T. Hayakawa, N. Dharmarasu, B. Vengatesan, H. Hillmer

Proceedings Volume 6993, 69930B (2008) https://doi.org/10.1117/12.781359

KEYWORDS: Etching, Indium gallium arsenide, Optical filters, Wet etching, Tunable filters, Reflectivity, Electronic filtering, Doping, Optical components, Arsenic

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Proceedings Article | 25 April 2008 Paper

Light concentrating micromirror arrays for photovoltaics

J. Ackermann, O. Setyawati, V. Viereck, N. Dharmarasu, H. Hillmer

Proceedings Volume 6993, 69930G (2008) https://doi.org/10.1117/12.781027

KEYWORDS: Micromirrors, Mirrors, Solar cells, Photovoltaics, Aluminum, Solar concentrators, Sun, Microopto electromechanical systems, Finite element methods, 3D modeling

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SPIE Journal Paper | 1 July 2005

Heat transfer improvement in quasi-monolithic integration technology

Mojtaba Joodaki, Guenter Kompa, Hartmut Hillmer, Rainer Kassing

JM3, Vol. 4, Issue 03, 033011, (July 2005) https://doi.org/10.1117/12.10.1117/1.2008968

KEYWORDS: Transistors, Epoxies, Resistance, Gallium arsenide, Gold, Silicon, Reliability, Packaging, Field effect transistors, Electronics

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Proceedings Article | 3 June 2005 Paper

Wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for filters and VCSELs using micromachined actuation

H. Hillmer, A. Tarraf, F. Riemenschneider, S. Irmer, H. Halbritter, J. Daleiden, F. Romer, C. Prott, E. Ataro, A. Hasse, M. Strassner, S. Hansmann, P. Meissner

Proceedings Volume 5825, (2005) https://doi.org/10.1117/12.611337

KEYWORDS: Vertical cavity surface emitting lasers, Mirrors, Optical filters, Silicon, Resonators, Microopto electromechanical systems, Dense wavelength division multiplexing, Dielectrics, Tunable filters, Reflectivity

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SPIE Journal Paper | 1 October 2003

Wide and continuous wavelength tuning of microcavity devices for optoelectronic applications

Juergen Daleiden, Amer Tarraf, Soeren Irmer, Friedhard Römer, Cornelia Prott, Edwin Ataro, Martin Strassner, Hartmut Hillmer

JM3, Vol. 2, Issue 04, (October 2003) https://doi.org/10.1117/12.10.1117/1.1610474

KEYWORDS: Reflectivity, Vertical cavity surface emitting lasers, Silicon, Optical microcavities, Mirrors, Optical filters, Electronic filtering, Control systems, Absorption, Tunable filters

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Proceedings Article | 14 August 2003 Paper

Ultrawide continuously tunable 1.55-µm vertical-air-cavity wavelength-selective elements for VCSELs using micromachined electrostatic actuation

Hartmut Hillmer, Juergen Daleiden, Cornelia Prott, Friedhard Roemer, Soeren Irmer, Edwin Ataro, Amer Tarraf, D. Gutermuth, I. Kommallein, Martin Strassner

Proceedings Volume 5246, (2003) https://doi.org/10.1117/12.512525

KEYWORDS: Vertical cavity surface emitting lasers, Optical filters, Mirrors, Reflectivity, Silicon, Quantum wells, Photonic crystals, Refractive index, Tunable filters, Photomasks

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Proceedings Article | 17 June 2003 Paper

142-nm electrostatically actuated tuning using surface-micromachined vertical air-cavity wavelength-selective elements for applications in 1.55-um VCSELs

Hartmut Hillmer, Cornelia Prott, Jurgen Daleiden, Friedhard Romer, Soeren Irmer, Edwin Ataro, Martin Strassner

Proceedings Volume 4994, (2003) https://doi.org/10.1117/12.475722

KEYWORDS: Optical filters, Vertical cavity surface emitting lasers, Mirrors, Reflectivity, Silicon, Resonators, Semiconductors, Refractive index, Photomasks, Quantum wells

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Proceedings Article | 25 March 2003 Paper

Continuously tunable InP-based multiple air-gap MOEMS filters with ultrawide tuning range

Soeren Irmer, Juergen Daleiden, Ventzeslav Rangelov, Cornelia Prott, Friedhard Roemer, Martin Strassner, Amer Tarraf, Hartmut Hillmer

Proceedings Volume 4945, (2003) https://doi.org/10.1117/12.471977

KEYWORDS: Electronic filtering, Reflectivity, Tunable filters, Telecommunications, Mirrors, Optical filters, Silicon, Photomasks, Microopto electromechanical systems, Etching

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Proceedings Article | 25 March 2003 Paper

Novel low-cost and simple fabrication technology for tunable dielectric active and passive optical air-gap devices

Amer Tarraf, Juergen Daleiden, Soeren Irmer, Ventzeslav Rangelov, Friedhard Roemer, Cornelia Prott, Edwin Ataro, Hartmut Hillmer, Thomas Fuhrmann, Till Spehr, Josef Salbeck

Proceedings Volume 4945, (2003) https://doi.org/10.1117/12.471987

KEYWORDS: Dielectrics, Silicon, Silica, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Optical filters, Diffraction, Glasses, Plasma, Tunable filters

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Proceedings Article | 11 March 2003 Paper

Potential of micromachined photonics: miniaturization, scaling, and applications in continuously tunable vertical air-cavity filters

Hartmut Hillmer, Juergen Daleiden, Soeren Irmer, Friedhard Roemer, Cornelia Prott, Amer Tarraf, Martin Strassner, Edwin Ataro, Thorsten Scholz

Proceedings Volume 4947, (2003) https://doi.org/10.1117/12.473152

KEYWORDS: Silicon, Optical filters, Reflectivity, Mirrors, Semiconductors, Refractive index, Etching, Vertical cavity surface emitting lasers, Photomasks, Micromachining

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Proceedings Article | 21 January 2003 Paper

Bionics: precise color tuning by interference in nature and technology: applications in surface-micromachined 1.55-um vertical air-cavity filters

Hartmut Hillmer, Juergen Daleiden, Cornelia Prott, Soeren Irmer, Friedhard Roemer, Edwin Ataro, Amer Tarraf, H. Ruehling, Markus Maniak, Martin Strassner

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477916

KEYWORDS: Optical filters, Photonic crystals, Mirrors, Vertical cavity surface emitting lasers, Optical communications, Telecommunications, Refractive index, Biomimetics, Resonators, Reflectivity

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Proceedings Article | 4 December 2002 Paper

Continuously tunable air-gap microcavity devices for optical communication systems

Juergen Daleiden, Soeren Irmer, Edwin Ataro, Cornelia Prott, Ventzeslav Rangelov, Friedhard Roemer, Martin Strassner, Amer Tarraf, Hartmut Hillmer

Proceedings Volume 4871, (2002) https://doi.org/10.1117/12.455562

KEYWORDS: Reflectivity, Vertical cavity surface emitting lasers, Silicon, Mirrors, Optical filters, Microopto electromechanical systems, Absorption, Optical microcavities, Telecommunications, Control systems

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Proceedings Article | 12 June 2002 Paper

Ultrawide continuously tunable 1.55-um vertical-air-cavity filters and VCSELs based on micromachined electrostatic actuation

Hartmut Hillmer, Juergen Daleiden, Cornelia Prott, Friedhard Roemer, Amer Tarraf, Soeren Irmer, Ventzeslav Rangelov, S. Schueler, Martin Strassner

Proceedings Volume 4646, (2002) https://doi.org/10.1117/12.470511

KEYWORDS: Reflectivity, Vertical cavity surface emitting lasers, Optical filters, Silicon, Mirrors, Tunable filters, Polymers, Semiconductors, Quantum wells, Photomasks

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Proceedings Article | 27 December 2001 Paper

Using scanning probe microscopy and nanomoter surface profiler of DEDTAK for determination of thermal stress in quasi-monolithic integration technology (QMIT)

Mojtaba Joodaki, Teoman Senyildiz, Guenter Kompa, Rainer Kassing, Hartmut Hillmer

Proceedings Volume 4468, (2001) https://doi.org/10.1117/12.452550

KEYWORDS: Scanning probe microscopy, Epoxies, Silicon, Profilometers, Gallium arsenide, Temperature metrology, Field effect transistors, Standards development, Microwave radiation, Manufacturing

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Proceedings Article | 15 March 1999 Paper

Ultrafast modulation of 1.55-um QW laser structures: optically detected carrier dynamics, limiting mechanisms, and applications

Hartmut Hillmer, Saulius Marcinkevicius

Proceedings Volume 3734, (1999) https://doi.org/10.1117/12.342362

KEYWORDS: Quantum wells, Chlorine, Modulation, Carrier dynamics, Doping, Laser applications, Laser optics, Electron transport, Heterojunctions, Semiconductors

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Proceedings Article | 20 January 1999 Paper

Semiconductor lasers for high-bit-rate optical data transmission: investigations to increase the yield of laser arrays

Hartmut Hillmer, Bernd Klepser

Proceedings Volume 3688, (1999) https://doi.org/10.1117/12.337528

KEYWORDS: Thin films, Silver, Semiconductor lasers, Wavelength division multiplexing, Thermal modeling, Laser welding, Temperature metrology, Data transmission, Yield improvement, Packaging

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Proceedings Article | 30 December 1998 Paper

Optically detected carrier transport and capture in III/V semiconductor QW structures: high-resolution experiments, model calculations, and applications in fast 1.55-um lasers

Hartmut Hillmer, Saulius Marcinkevicius

Proceedings Volume 3683, (1998) https://doi.org/10.1117/12.334816

KEYWORDS: Quantum wells, Chlorine, Electrons, Carrier dynamics, Modulation, Heterojunctions, Semiconductors, Doping, Laser applications, Semiconductor lasers

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Proceedings Article | 24 September 1996 Paper

Self-aligned processing techniques for semiconductor stripe lasers

Hongliang Zhu, Hartmut Hillmer

Proceedings Volume 2886, (1996) https://doi.org/10.1117/12.251900

KEYWORDS: Waveguides, Laser processing, Metals, Fabrication, Polymers, Semiconductor lasers, Silica, Photomasks, Etching, Waveguide lasers

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Proceedings Article | 1 May 1996 Paper

Carrier and photon dynamics in transversally asymmetric high-speed AlGaAs/InP MQW lasers

Hartmut Hillmer, A. Greiner, F. Steinhagen, Herbert Burkhard, R. Loesch, Winfried Schlapp, Thomas Kuhn

Proceedings Volume 2693, (1996) https://doi.org/10.1117/12.238971

KEYWORDS: Quantum wells, Modulation, Electrons, Chlorine, Amplitude modulation, Waveguides, Scattering, Phase shifts, Doping, Heterojunctions

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Proceedings Article | 1 March 1996 Paper

Chirped DFB gratings using bent waveguides to tailor specific laser properties

Hartmut Hillmer

Proceedings Volume 2713, (1996) https://doi.org/10.1117/12.234182

KEYWORDS: Waveguides, Phase shifts, Photomasks, Lithography, Semiconducting wafers, Tunable lasers, Wavelength tuning, Semiconductor lasers, Laser stabilization, Electron beam lithography

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SPIE Journal Paper | 1 October 1995

Facet influence on wavelength tunability and linewidth chirp in InGaAs/InAlGaAs quantum-well distributed feedback lasers under high-bit-rate modulation

Hartmut Hillmer, Stefan Hansmann, Herbert Burkhard

OE, Vol. 34, Issue 10, (October 1995) https://doi.org/10.1117/12.10.1117/12.210767

KEYWORDS: Pulsed laser operation, Modulation, Data modeling, Phase shifts, Refractive index, Quantum wells, Reflectivity, Hole burning spectroscopy, Laser damage threshold, Semiconducting wafers

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Proceedings Article | 19 June 1995 Paper

Effects of injected light and optical feedback on directly modulated MQW lasers and OTDM multigigabit-per-second system performance

Herbert Burkhard, S. Mohrdiek, H. Schoell, Hartmut Hillmer, Stefan Hansmann, A. Mattheus

Proceedings Volume 2399, (1995) https://doi.org/10.1117/12.212540

KEYWORDS: Modulation, Solitons, Interference (communication), Picosecond phenomena, Dispersion, Receivers, Optical amplifiers, Optical simulations, Optical filters, Pulsed laser operation

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Proceedings Article | 28 April 1995 Paper

Application of DFB lasers with individually chirped gratings

Hartmut Hillmer, Stefan Hansmann, Herbert Burkhard, A. Grabmaier, E. Kuphal

Proceedings Volume 2382, (1995) https://doi.org/10.1117/12.208448

KEYWORDS: Picosecond phenomena, Waveguides, Laser stabilization, Laser damage threshold, Chlorine, Phase shifts, Wavelength tuning, Tunable lasers, Hole burning spectroscopy, Homogenization

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Proceedings Article | 25 August 1994 Paper

Facet influence on wavelength tunability and linewidth-chirp under high bit rate modulation in InGaAs/InAlGaAs quantum well (QW) DFB lasers

Hartmut Hillmer, Stefan Hansmann, Herbert Burkhard, Herbert Walter, H. Janning, R. Goebel

Proceedings Volume 2212, (1994) https://doi.org/10.1117/12.185112

KEYWORDS: Quantum wells, Pulsed laser operation, Modulation, Data modeling, Phase shifts, Refractive index, Laser damage threshold, Reflectivity, Hole burning spectroscopy, Semiconducting wafers

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Proceedings Article | 16 June 1993 Paper

Large-wavelength tunability of asymmetric three-section DFB lasers under cw and pulsed bias

Hartmut Hillmer, H. Zhu, Herbert Burkhard

Proceedings Volume 1850, (1993) https://doi.org/10.1117/12.146903

KEYWORDS: Semiconductor lasers, Phase shifts, Wavelength tuning, Etching, Dry etching, Modulation, Technologies and applications, Phase shift keying, Pulsed laser operation, Hole burning spectroscopy

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Showing 5 of 37 publications

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