Ms. Heather F. Johnson Profile

Heather F. Johnson

Graduate Research Assistant at Univ of Texas at Austin

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Publications (3)

Proceedings Article | 16 June 2003 Paper

Cationic graft polymerization lithography

Heather Johnson, Sahban Ozair, Andrew Jamieson, Brian Trinque, Colin Brodsky, C. Grant Willson

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484974

KEYWORDS: Polymers, Lithography, Polymerization, Etching, Silicon, Crystals, Polymer thin films, Quartz, Imaging systems, Oxygen

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Proceedings Article | 24 July 2002 Paper

Effect of humidity on deprotection kinetics in chemically amplified resists

Sean Burns, David Medeiros, Heather Johnson, Gregory Wallraff, William Hinsberg, C. Grant Willson

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474230

KEYWORDS: Humidity, Photoresist materials, Nitrogen, FT-IR spectroscopy, Semiconducting wafers, Chemically amplified resists, Environmental monitoring, Polymers, Switching, Spectroscopy

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Proceedings Article | 20 August 2001 Paper

Advances in graft polymerization lithography

Colin Brodsky, Brian Trinque, Heather Johnson, C. Grant Willson

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436660

KEYWORDS: Polymers, Polymerization, Silicon, Oxides, Lithography, Deposition processes, Liquids, Chemistry, Photoresist processing, Image processing

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