Dr. Hirokimi Shirasaki Profile

Dr. Hirokimi Shirasaki

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Publications (14)

Proceedings Article | 18 March 2016 Paper

Oblique incidence scatterometry for 2D/3D isolation mounts with RCWA and PML

Hirokimi Shirasaki

Proceedings Volume 9778, 977821 (2016) https://doi.org/10.1117/12.2218732

KEYWORDS: Scatterometry, Silicon, Optical lithography, Algorithm development, Reflectivity, 3D metrology, Shape analysis, Computer simulations, Spectroscopy, Genetic algorithms, Radio propagation, Wave propagation, Electromagnetism, Finite-difference time-domain method, Diffraction, Light scattering, Electromagnetic radiation

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Proceedings Article | 19 March 2015 Paper

3D isolation mounts scatterometry with RCWA and PML

Hirokimi Shirasaki

Proceedings Volume 9424, 942421 (2015) https://doi.org/10.1117/12.2085660

KEYWORDS: Silicon, Reflectivity, Scatterometry, Radio propagation, Wave propagation, Electromagnetism, Finite-difference time-domain method, Diffraction, Light scattering, Laser scattering

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Proceedings Article | 2 April 2014 Paper

Isolation mounts scatterometry with RCWA and PML

Hirokimi Shirasaki

Proceedings Volume 9050, 90502K (2014) https://doi.org/10.1117/12.2046394

KEYWORDS: Silicon, Reflectivity, Scatterometry, Wave propagation, Radio propagation, Electromagnetism, Finite-difference time-domain method, Diffraction, Light scattering, Laser scattering

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Proceedings Article | 10 April 2013 Paper

Scatterometry simulator development with GPU, real-coded GA and RCWA

Hirokimi Shirasaki

Proceedings Volume 8681, 86811B (2013) https://doi.org/10.1117/12.2011289

KEYWORDS: Scatterometry, Silicon, Shape analysis, Computer simulations, Finite-difference time-domain method, Diffraction, Optimization (mathematics), Computer programming, Reflectivity, Genetic algorithms

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Proceedings Article | 20 April 2011 Paper

Scatterometry simulator using GPU and evolutionary algorithm

Hirokimi Shirasaki

Proceedings Volume 7971, 79711T (2011) https://doi.org/10.1117/12.881505

KEYWORDS: Scatterometry, Computer simulations, Evolutionary algorithms, Reflectivity, Optimization (mathematics), Silicon, Finite-difference time-domain method, Shape analysis, Spectroscopy, Parallel computing

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Proceedings Article | 2 April 2010 Paper

Scatterometry simulator for multicore CPU

Hirokimi Shirasaki

Proceedings Volume 7638, 76382V (2010) https://doi.org/10.1117/12.848331

KEYWORDS: Scatterometry, Reflectivity, Parallel computing, Spectroscopy, Optimization (mathematics), Finite-difference time-domain method, Reflection, Computer simulations, Silicon, Diffraction

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Proceedings Article | 25 March 2008 Paper

3D semiconductor grooves measurement simulations (scatterometry) using nonstandard FDTD methods

Hirokimi Shirasaki

Proceedings Volume 6922, 69223T (2008) https://doi.org/10.1117/12.773961

KEYWORDS: Reflectivity, Silicon, Finite-difference time-domain method, Scatterometry, 3D metrology, Maxwell's equations, Semiconductors, Light scattering, Mass attenuation coefficient, Scattering

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Proceedings Article | 5 April 2007 Paper

3D anisotropic semiconductor grooves measurement simulations (scatterometry) using FDTD methods

Hirokimi Shirasaki

Proceedings Volume 6518, 65184D (2007) https://doi.org/10.1117/12.711371

KEYWORDS: Finite-difference time-domain method, Anisotropy, Silicon, Dielectrics, Scatterometry, Semiconductors, Light scattering, Maxwell's equations, Scattering, Magnetism

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Proceedings Article | 24 March 2006 Paper

3D isolated and periodic grooves measurement simulations the semiconductor circuits by scatterometry using the FDTD methods and the time shortening calculation method

Hirokimi Shirasaki

Proceedings Volume 6152, 61523O (2006) https://doi.org/10.1117/12.654315

KEYWORDS: Finite-difference time-domain method, Reflectivity, Gaussian beams, Scattering, Silicon, Magnetism, Scatterometry, Laser scattering, 3D metrology, Semiconductors

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Proceedings Article | 10 May 2005 Paper

Arbitrary cross sections and stack forms measurement simulations for the semiconductor circuits by scatterometry

Hirokimi Shirasaki

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.597164

KEYWORDS: Scattering, Silicon, Reflectivity, Finite-difference time-domain method, Scatterometry, Light scattering, Semiconductors, Matrices, Electromagnetic scattering, Shape analysis

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Proceedings Article | 24 May 2004 Paper

Arbitrary 3D linewidth form measurement simulations for the next-generation semiconductor circuits by scatterometry using the FDTD method

Hirokimi Shirasaki

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533579

KEYWORDS: Finite-difference time-domain method, Silicon, Scattering, Scatterometry, 3D metrology, Reflectivity, Magnetism, Semiconductors, Near field, Light scattering

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Proceedings Article | 24 May 2004 Paper

Linewidth measurement simulations for semiconductor circuits by scatterometry using FDTD and time shortening calculation method

Hirokimi Shirasaki, Kunio Ueta

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533571

KEYWORDS: Finite-difference time-domain method, Silicon, Reflectivity, Scatterometry, Electromagnetism, Scattering, Magnetism, Semiconductors, Light scattering, Maxwell's equations

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Proceedings Article | 2 June 2003 Paper

Resist and silicon trench array line width measurement simulations for the next-generation semiconductor circuits by optical scattering properties using the FDTD method

Hirokimi Shirasaki, Kunio Ueta, Noriyuki Kondou

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.482643

KEYWORDS: Reflectivity, Silicon, Finite-difference time-domain method, Phase shifts, Scattering, Gaussian beams, Light scattering, Magnetism, Semiconductors, Device simulation

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Proceedings Article | 16 July 2002 Paper

Shape measurement simulation for the silicon trench array by scattering properties and continuous wavelet analysis with interference spectroscopy

Hirokimi Shirasaki

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473511

KEYWORDS: Silicon, Wavelets, Scattering, Laser scattering, Finite-difference time-domain method, Light scattering, Dielectrics, Spectroscopy, Visible radiation, Gaussian beams

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Showing 5 of 14 publications

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