KEYWORDS: Interferometry, Optical components, 3D image processing, Detection and tracking algorithms, Optics manufacturing, High power lasers, Defect detection, Laser systems engineering, Computer simulations, 3D metrology
Surface defects on large-aperture optical elements are one of the key factors to restrain the improvement of performance of high-power laser systems. Detecting and characterizing accurately these defects are an important basis for optical elements manufacturing and system performance evaluation. Based on the principle of transient interferometry, a measurement setup used to detect the three-dimensional features of surface defects is reported in this paper. We also propose a template matching and stitching algorithm for interferometric images obtained by the system: Firstly, determining whether the interference images have enough features to complete the stitching work; secondly, selecting the stitching template in the area where the template image needed to be stitched; Finally, searching for the template in the stitched image, and calculating the relative offset of these two images according to the relative position of the template to complete the stitching work. Through simulation analysis and actual image obtained by the measurement system verification, the proposed algorithm has the advantages of good noise resistance and high mosaic accuracy. Moreover, it has a positive significance for the study of transient interferometry detection.
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