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Jessica L. Grayson
at Univ of Texas at Dallas
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Publications (3)
Proceedings Article | 9 April 2024 Presentation + Paper
Indium nitrate hydrate resist characteristics evaluated by low-energy electron beam exposure
Marisol Valdez, Alexandra Joshi-Imre, Justin Bonner, Leigh Preimesberger, Jesse Grayson, Julia W. Hsu
Proceedings Volume 12957, 129570Q (2024) https://doi.org/10.1117/12.3010889
KEYWORDS: Metal oxides, Photoresist developing, Contrast sensitivity, Indium, Electron beam lithography, FT-IR spectroscopy, Electron beams, Extreme ultraviolet
SPIE Journal Paper | 2 January 2024 Open Access
Indium nitrate hydrate films as potential EUV resists: film formation, characterization, and solubility switch assessment using a 92-eV electron beam
Jesse Grayson, Marisol Valdez, Weijie Xu, Julia W. Hsu
JM3, Vol. 23, Issue 01, 014601, (January 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.014601
KEYWORDS: Indium, Extreme ultraviolet, Humidity, Extreme ultraviolet lithography, Crystals, Switches, Solubility, Metals, Optical microscopes, Film thickness
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Proceedings Article | 1 May 2023 Presentation + Paper
Indium nitrate hydrate films as EUV resists by evaluating with 92-eV electron beam
Jesse Grayson, Marisol Valdez, Weijie Xu, Julia W. Hsu
Proceedings Volume 12498, 1249811 (2023) https://doi.org/10.1117/12.2663005
KEYWORDS: Indium, Extreme ultraviolet, Humidity, Extreme ultraviolet lithography, Sol gels, Optical microscopes, Crystals, Metals, Film thickness, Atomic force microscopy
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