This study introduces an advanced Adaptive Optics (AO) technique employing a Digital Micromirror Device (DMD) for effective wavefront correction. The innovation lies in utilizing the DMD as a Spatial Light Modulator (SLM), marking a departure from traditional methods that mainly used Liquid Crystal on Silicon (LCoS) for this purpose. With its high resolution (912×1440 pixels) and ultra-fast response, the DMD enhances the system's efficiency in correcting optical aberrations. By applying the Lee Hologram Method within off-axis binary holography, our approach generates inverse wavefronts to counteract environmental distortions, thereby improving image clarity. The integration of a DMD-assisted Lateral Shearing Interferometer, which adjusts the incident light angle through wavefront modulation, accelerates optical path difference (OPD) measurement. Implementing a Five-Step Phase Shifted Method for both X and Y directional fringe patterns facilitates rapid phase retrieval. This process, crucial for reconstructing and correcting wavefront aberrations, leverages the differential phase information from the Lateral Shearing Interferometer. Our experimental results affirm the system's effectiveness in not only rectifying wavefront distortions but also in showcasing the enhanced performance capabilities brought forth by the DMD-assisted Lateral Shearing Interferometer.
The study is to establish the non-contact blood pressure measurement model. We propose a novel hybrid blood pressure assessment model. This model employs digital signal processing (DSP) to process the Imaging Photoplethysmography (iPPG) signal, utilizing Support Vector Machine (SVM) classification to determine the optimal signal location through three parameters. It is then compared with a PPG device. Through a CNN-LSTM model, it aims to reconstruct the ideal iPPG signal, transforming signals from the dermal layer into radial artery signals. Based on the Beer-Lambert law, the natural logarithm of iPPG intensity is proportional to blood flow velocity. Thus, a regression model for mean arterial pressure is developed in this work using heart rate and the intensity of iPPG signals. In conclusion, statistical test results confirm the validity of this study, indicating significant potential for the future development of noncontact blood pressure monitoring.
Most near-eye displays with one fixed focal plane suffer from the vergence-accommodation conflict (VAC) and cause visual discomfort to users. In contrast, a light field display with continuous focal planes offers the most natural and comfortable AR/VR visual experiences without VAC and holds the promise to be the ultimate near-eye 3-D display. It projects light rays onto human retina as if the light rays were emanated from a real object. This paper considers a near-eye light field display comprising a light field generator, a collimator, and a geometric waveguide as the three main components. It takes 4-D light field data in the form of an array of 2-D subview images as input and generates a light field as output. The light field generator is the device responsible for converting the light emitted from the display panel to the light representing the light field of a virtual scene. The geometric waveguide along with a collimator ensures that the light rays propagating in the waveguide are collimated. The partially reflective mirrors of the waveguide replicate the optical path to achieve exit pupil expansion (EPE) and a large eyebox. However, existing waveguide eyepieces for near-eye AR/VR displays are not designed for, and hence may not fit light field displays. In this work, we look into a geometric waveguide for light field display and find that the light fields replicated by the partially reflective mirrors cannot perfectly overlap on the user’s retina, resulting in the appearance of multiple repetitive images—a phenomenon we call “ghost artifact”. This paper delves into the cause of this artifact and develops a solution for applications that require short-range interaction with virtual objects, such as surgical procedures. We define a working range devoid of noticeable ghost artifact based on the angular resolution characteristics of human eye and optimize the orientation of an array of partially reflective mirrors of the waveguide to meet the image quality requirement for short-range interaction. With the optimized waveguide, the ghost artifact is significantly reduced. More results of the optimized waveguide will be shown at the conference.
Natural and comfortable visual experience is critical to the success of metaverse, which has recently drawn worldwide attention. However, due to the vergence-accommodation conflict (VAC), most augmented reality (AR) or virtual reality (VR) displays on the market today can easily cause visual discomfort or eyestrain to users. Being able to resolve the VAC, light field display is commonly believed to be the ultimate display for metaverse. Similar to conventional near-eye AR displays, a near-eye light field AR display consists of three basic components: light source, projection unit, and eyepiece. Although the same light source can be used in both kinds of displays, the projection unit and the eyepiece of a near-eye light field AR display call for a new design to preserve the structure of light field when it reaches user’s retina. The primary focus of this paper is on the eyepiece design for a near-eye light field AR display. In consideration of the compact form factor and wide field of view, the birdbath architecture, which consists of a beam splitter and a combiner, is selected as the basis of our eyepiece design. We optimize the birdbath eyepiece for the light field projection module produced by PetaRay Inc. The birdbath eyepiece receives the light field emitted from the light field projection module and projects it fully into the user’s eye. Our design preserves the structure of light field and hence allows virtual objects at different depths to be properly perceived. In addition, the eyepiece design leads to a compact form factor for the near-eye light field AR display. Specifically, our eyepiece is designed by optimizing the tradeoff between the eyebox and the depth of focus (DOF) of the near-eye light field AR display. The resulting DOF allows the user to have a clear and sharp perception of any virtual object in the working range, which is from 30 cm to infinity. In addition, we optimize the entrance pupil position and the F-number of the eyepiece according to the exit pupil position and the divergence angle of the light field projection module. This way, the eyepiece is able to preserve the structure of light field, meaning that the angular relation between light rays coming from the same object point in space is preserved. To demonstrate the performance of our birdbath eyepiece, we use the Human Eye Model-Liou & Brennan (JOSA A 08/97) to simulate the image formation process.
We propose a novel continuous blood pressure monitoring system which is based on an autonomic nervous system, and which considers blood volume simultaneously since both affect blood pressure. An autonomic nervous system regulates blood pressure while blood volume is known to be proportional to the photoplethysmography (PPG) signal. To overcome the limitation of taking blood pressure using a conventional cuff inflating instrument, we designed a system which can achieve continuous blood pressure monitoring. In this research, we used a set of near-infrared light source (940nm) to create a divergent light which was collimated as a uniform beam incident to a wrist surface through a Fourier optics designed transfer lens. We found that the signals became more stable due to the uniform illumination and could be received by a detector. From the signals, we found that the blood volume when converted from blood velocity as measured by an ultrasound probe, showed a strong correlation with the signals. The heart rate variability analyzed from the signals, including time-domain (HR and SDNN) and frequency-domain (LF and HF) indices, could be viewed as physical models since these indices reflect the functions of an autonomic nervous system. Moreover, the research derived regression models can estimate blood pressure. Although it is not common to assess blood pressure from the perspective of an autonomic nervous system and blood flow simultaneously, our research approach seems logical. Our results show the potential for this novel system to be used for blood pressure health monitoring.
A programmable ultraviolet light-emitting diode (UVLED) array with a transfer lens forms an adjustable intensity distribution upon a mask, whether for the uniform distribution or variable distribution for compensate wavefront error introduced by the lithographic lens, so as to fabricate an aberration-free pattern on a wafer. The collimating and aligning all rays in one aperture lens with a N × N two-dimensional UVLED array is designed and fabricated by integrating with lithographic lens to form aberration-free smallest linewidth in integrated circuit wafer. Our work provides a transfer lens for the UVLED array to manipulate the intensity distribution fitted for the aligner in the soft- and near-contact mode and steppers.
In making sensors require multiple processing by using different masks to accomplish, it needs reload and multiple aligning for a wafer in order to make a functional wafer, thus, the consuming for making mask are wasted, and used lamps toxic. In the study, a ULVLED stepper with Programmable LCoS or DLP as mask for multiple process wafer is proposed. By a programmable ultraviolet light-emitting diode (UVLED) array with a collimated lens as a transfer lens forms uniform source, to expose programmable LCoS or DLP as mask by using a 1 to 1 lithographic lens. Sensors and optical binary lens are easily made.
A light field display for near eye viewing to reduce the human eye vergence-accommodation conflict (VAC) existing in most stereoscopic VR devices is designed and demonstrated . The 3D perception of the resulting light field is verified by using eye models. The Light Field Displays for Near Eye has verified by focal adjustable camera, and proved its function for free of VAC.
UVLED array aligner for proximity and soft contact exposure has been designed and fabricated. The source is designed for a lithography aligner, each UVLED is arranged in a plate with equal space to form UVLED array source. With AAAAS illumination optics, the aligner is built and has provided the uniformly source. 12 inches wafer with 0.6 micron mask for TSV process has proved in soft contact and proximity exposure modes, with less 1 microns for soft contact. 20 microns for 100 microns proximity exposure, with deviation of 1 micron.
The design of four mirrors anti-astigmatism astronomical telescope is carried out for low earth orbit satellite. By integrating with Cassagrain and Schwartzschild configurations, the telescope is design. It contains four mirrors with conic surface, to form an aberration free. The system contains two parts: first part is the Cassagrain type telescope for pick up the ground object to the stop position, and the second part is Schwartzschild configurations as relay optics, which is to relay the image to high resolution CCD sensor to provide 0.5 ground space distance image. The system is symmetric with aberration free within a one cubic size fitted for small satellite. The optic mechanical is simple easy to assemble for optical calibration, while the body is rigid in space.
To achieve the smallest line width of IC requires the spherical and coma aberration free lithography optics. Once the aberration of lens is formed, it is hard to amend the mask to original requirement, unless the light pattern figure is adjustable. A programmable UVLED array with a collimated lens as Fourier transfer lens forms an adjustable pattern as the intensity profile to amend the aberration of mask to form aberration free mask intensity pattern into wafer. A 25 X 25 UVLED array with collimated lens is applied to correct the aberration contained mask, is to form a corrected pattern under the requirement for reducing aberration mask to form a smallest line width.
Smartphone require limit space for image system, current lens, used in smartphones are refractive type, the effective focal length is limited the thickness of phone physical size. Other, such as optro-electronics sensing chips, proximity optical sensors, and UV indexer chips are integrated into smart phone with limit space. Due to the requirement of multiple lens in smartphone, proximity optical sensors, UV indexer and other optro-electronics sensing chips in a limited space of CPU board in future smart phone, optro-electronics 3D IC’s integrated with optical lens or components may be a key technology for 3 C products. A design for reflective lens is fitted to CMOS, proximity optical sensors, UV indexer and other optro-electronics sensing chips based on 3-D IC. The reflective lens can be threes times of effective focal lens, and be able to resolve small object. The system will be assembled and integrated in one 3-D IC more easily.
High efficiency coupling of the array of UV light diode light source could be able to replace the traditional mercury light source, while mercury light source requires a large amount of electricity, condenser optics and volume, with hazard environmental issue. It is an urgent need for further requirement of light source for lithography. Although array UVLED could be a replacement of light sources of lithography, there are some existent optical parameters that not fit for optical coupling, such as large divergent cone angle of single chip and half divergent angle of array, which are weak the possibility of application in lithography. Before the broadly accepted by lithography, those shortages have to be overcome. Some techniques, such as designing small divergent cone angle of single chip, or eliminating divergent angle have suggested by fly eye and other methods, yet all of those methods, only improve the coupling efficiency and uniformity of emitted surface in some limited extent. The project is to develop a high coupling efficiency of the optical system used in the array of UV light diodes, which can make the high coupling efficiency, despite UVLED has a small size and large divergent angle. The optical design of illumination has carried out for array UVLED, an illumination optics has designed based on Koehler type illumination, and it has shown reducing the divergent angle to increase in coupling efficiency between the Array UVLED to the mask of lithography. The uniformity of average power has shown excellently fitted for high quality lithography in direct exposure or lens exposure.
Due to the lithography demanding high performance in projection of semiconductor mask to wafer, the lens has to be almost free in spherical and coma aberration, thus, in situ optical testing for diagnosis of lens performance has to be established to verify the performance and to provide the suggesting for further improvement of the lens, before the lens has been build and integrated with light source. The measurement of modulation transfer function of critical dimension (CD) is main performance parameter to evaluate the line width of semiconductor platform fabricating ability for the smallest line width of producing tiny integrated circuits. Although the modulation transfer function (MTF) has been popularly used to evaluation the optical system, but in lithography, the contrast of each line-pair is in one dimension or two dimensions, analytically, while the lens stand along in the test bench integrated with the light source coherent or near coherent for the small dimension near the optical diffraction limit, the MTF is not only contributed by the lens, also by illumination of platform. In the study, the partial coherence modulation transfer function (PCMTF) for testing a lithography lens is suggested by measuring MTF in the high spatial frequency of in situ lithography lens, blended with the illumination of partial and in coherent light source. PCMTF can be one of measurement to evaluate the imperfect lens of lithography lens for further improvement in lens performance.
An ultrashort throw liquid crystal on silicon (LCoS) projector for home cinema, virtual reality, and automobile heads-up display has been designed and fabricated. To achieve the best performance and highest-quality image, this study aimed to design wide-angle projection optics and optimize the illumination for LCoS. Based on the telecentric lens projection system and optimized Koehler illumination, the optical parameters were calculated. The projector’s optical system consisted of a conic aspheric mirror and image optics using either symmetric double Gauss or a large-angle eyepiece to achieve a full projection angle larger than 155 deg. By applying Koehler illumination, image resolution was enhanced and the modulation transfer function of the image in high spatial frequency was increased to form a high-quality illuminated image. The partial coherence analysis verified that the design was capable of 2.5 lps/mm within a 2 m×1.5 m projected image. The throw ratio was less than 0.25 in HD format.
The critical dimension(CD) is main factor to determine the line width of semiconductor equipment fabricating ability for the smallest line width of produced electronic components. Modulation transfer function(MTF) has been popularly used to evaluation the optical system, due to the contrast of each line-pair in dimension analytically, however, while the light source is coherent or near coherent for the small dimension near the optical diffraction limit, the MTF is hard to achieve consistently. The study of ultra-violet partial coherence modulation transfer function is to calculate the 1-D and 2-D the line with anoptical design program, to estimate the MTF near the size of diffraction limit. It provides fabricating parameter for a 1-to-1 TSV lithographic system. By applying partial coherence analysis, the optimized relative numerical aperture (RNA) has found. As the system is built, the optimized performance should be expected.
The design and fabrication of common optical components lithography Lens has been carried out for a 1 to 1 stepper. The specification of lens is fulfilled the 3-D lithography system as 2 micron in resolution for 1 inch x 2.8 inches system. The lens has been sophistically designed by dual path in a triplet to reduce the number of components. A single aspherical surface has been applied to reduce the aberration to diffraction limit in lens. The well-made shapes of lens have been suggested. Then, the fabrication of lens has been in the process. Finally, the optical axis of tolerance optical mechanical mountings for lens system in assembly has been analyzed, and valuable for assembly and fabrication.
In the past decade, the display format from (HD,High Definition) through Full HD(1920X1080),to UHD(4kX2k), mainly guides display industry to two directions: one is liquid crystal display(LCD) from 10 inch to 100 inch and more, and the other is projector. Although LCD has been popularly used in market; however, the investment for production such kind displays cost more money expenditure, and less consideration of environmental pollution and protection[1]. The Projection system may be considered, due to more viewing access, flexible in location, energy saving and environmental protection issues.
The topic is to design and fabricate a short throw factor liquid crystal on silicon (LCoS) projection system for cinema. It provides a projection lens system, including a tele-centric lens fitted for emitted LCoS to collimate light to enlarge the field angle. Then, the optical path is guided by a symmetric lens. Light of LCoS may pass through the lens, hit on and reflect through an aspherical mirror, to form a less distortion image on blank wall or screen for home cinema. The throw ratio is less than 0.33.
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