Mr. John A. Faria Profile

John A. Faria

at Affiliated Engineers Inc

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Publications (1)

Proceedings Article | 18 August 2005 Paper

Contamination sources and means of mitigation: a focus on particulate contamination, airborne molecular contamination and biological contamination.

J. Christopher Case, John Faria

Proceedings Volume 5933, 593309 (2005) https://doi.org/10.1117/12.617818

KEYWORDS: Particles, Contamination, Atmospheric particles, Carbon, Semiconductors, Optical filters, Systems modeling, Performance modeling, Manufacturing, Phase modulation

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