Dr. Juan Lopez Gejo Profile

Dr. Juan Lopez Gejo

at Columbia Univ

SPIE Involvement:

Author

Publications (4)

SPIE Journal Paper | 1 July 2007

Methods for the synthesis and purification of polycycloalkane candidates for photolithography immersion fluids at 193 nm: requirements for removal of oxygen

Juan Lopez Gejo, Joy Kunjappu, Willard Conley, Paul Zimmerman, Nicholas Turro

JM3, Vol. 6, Issue 03, 033003, (July 2007) https://doi.org/10.1117/12.10.1117/1.2778641

KEYWORDS: Oxygen, Absorption, Argon, Microfluidics, Absorbance, Refractive index, Optical lithography, Nitrogen, Molecules, Oxidation

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Proceedings Article | 22 March 2007 Paper

Outlook for potential third-generation immersion fluids

Juan López-Gejo, Joy Kunjappu, J. Zhou, B. Smith, Paul Zimmerman, Will Conley, Nicholas Turro

Proceedings Volume 6519, 651921 (2007) https://doi.org/10.1117/12.695536

KEYWORDS: Absorption, Refractive index, Oxygen, Argon, Microfluidics, Absorbance, Nitrogen, Liquids, Optical lithography, Oxidation

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SPIE Journal Paper | 1 January 2007

Amplification of the index of refraction of aqueous immersion fluids with crown ethers

Juan Lopez Gejo, Joy Kunjappu, Nicholas Turro, Willard Conley

JM3, Vol. 6, Issue 01, 013002, (January 2007) https://doi.org/10.1117/12.10.1117/1.2435730

KEYWORDS: Refractive index, Water, Microfluidics, Absorption, Refraction, Optical lithography, Liquids, Polymethylmethacrylate, Ultraviolet radiation, Fluid dynamics

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Proceedings Article | 29 March 2006 Paper

Amplification of the index of refraction of aqueous immersion fluids with crown ethers: a progress report

Juan López-Gejo, Joy Kunjappu, Nicholas Turro, Will Conley

Proceedings Volume 6153, 61530C (2006) https://doi.org/10.1117/12.659821

KEYWORDS: Refractive index, Water, Microfluidics, Liquids, Absorption, Optical lithography, Polymethylmethacrylate, Refraction, Ultraviolet radiation, Lithography

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