Mr. Junbi Zhang Profile

Junbi Zhang

at Beijing Institute of Technology

SPIE Involvement:

Author

Publications (3)

SPIE Journal Paper | 7 September 2023

Classification method of lithographic layout patterns based on graph convolutional network with graph attention mechanism

Junbi Zhang, Xu Ma, Shengen Zhang

JM3, Vol. 22, Issue 03, 034202, (September 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.034202

KEYWORDS: Matrices, Image classification, Lithography, Education and training, Convolution, Machine learning, Signal processing, Deep learning, Mathematical optimization, Data modeling

Read Abstract +

Proceedings Article | 22 February 2021 Poster + Paper

Fast optical proximity correction based on graph convolution network

Shengen Zhang, Xu Ma, Junbi Zhang, Rui Chen, Yihua Pan, ChengZhen Yu, Lisong Dong, Yayi Wei, Gonzalo Arce

Proceedings Volume 11613, 116130V (2021) https://doi.org/10.1117/12.2583773

KEYWORDS: Optical proximity correction, Signal processing, Convolution, Imaging systems, Systems modeling, Photomasks, Optimization (mathematics), Machine learning, Lithography, Integrated circuits

Read Abstract +

Proceedings Article | 22 February 2021 Poster + Paper

Lithography layout classification based on graph convolution network

Junbi Zhang, Xu Ma, Shengen Zhang, Xianqiang Zheng, Rui Chen, Yihua Pan, Lisong Dong, Yayi Wei, Gonzalo Arce

Proceedings Volume 11613, 116130U (2021) https://doi.org/10.1117/12.2583558

KEYWORDS: Lithography, Convolution, Signal processing, Network architectures, Image classification, Transform theory, Source mask optimization, Machine learning, Integrated circuits, Fourier transforms

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years