Mr. Katsunori Otsuki Profile

Katsunori Otsuki

at Micron Memory Japan Inc

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Author

Publications (2)

Proceedings Article | 10 April 2024 Poster

Analyzing line width roughness (LWR) sensitivity to resist and laser-induced speckle for enhanced PSD-based quantification

Takamitsu Komaki, Tomohiro Iwaki, Yuichi Mukai, Kouichi Fujii, Toshihiro Kobayashi, Toshihiro Ohga, Kouji Kakizaki, Takashi Saito, Risa Yasue, Natsuki Okada, Katsunori Otsuki, Tomonori Okada, Kanji Sugino, Takahito Kumazaki

Proceedings Volume PC12953, PC129530S (2024) https://doi.org/10.1117/12.3008944

KEYWORDS: Speckle, Line width roughness, Semiconductors, Scanners, Lithography, Light sources, Chromatic aberrations

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Proceedings Article | 30 April 2023 Presentation

To enhance EPE through PSD based quantification analysis of resist impact and lightsource induced LWR/LER

Toshihiro Oga, Takamitsu Komaki, Takeshi Ohta, Shinichi Matsumoto, Takashi Saitou, Tomohiro Iwaki, Kanji Sugino, Katsunori Otsuki

Proceedings Volume PC12494, PC124940C (2023) https://doi.org/10.1117/12.2658142

KEYWORDS: Semiconductors, Line edge roughness, Lithography, Line width roughness, Speckle, Manufacturing, Logic devices, Immersion lithography, Error analysis, Artificial intelligence

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