Mr. Ke-Wei Bian Profile

Ke-Wei Bian

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 19 November 2021 Paper

Design of a high-precision two-dimensional coplanar micro-vibration generator

Lian-sheng Zhang, Ke-Wei Bian, Ying-jun Lei, Rui-Jun Li, Kuang-Chao Fan

Proceedings Volume 12059, 120591L (2021) https://doi.org/10.1117/12.2612275

KEYWORDS: Actuators, Structural design, Control systems, Sensors, Calibration, Standards development, Control systems design

Read Abstract +

A high-precision two-dimensional (2D) coplanar micro-vibration generator with a flexure decoupling mechanism is proposed in this study. The generator is composed of a 2D symmetrical coplanar platform and a slider pair. The 2D coplanar platform structure is fully symmetric to achieve decoupling of motion in the X and Y directions. The vertical support with a slider pair is used to guarantee strict planar motion with heavy loads. Under open-loop control, the developed generator has the capability of translational motion stroke of 48.71 μm and 49.10 μm in the X and Y directions, respectively, and the maximum coupling error is approximately 0.78%. A PID control system was designed to realize the closed-loop control of the vibration generator. The control system can effectively reduce the inertial vibration and settling time of the generator. In addition, the closed-loop controlled vibration generator also has good motion tracking characteristics.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years