Dr. Kevin Gao Profile

Dr. Kevin Gao

at HMI

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Publications (3)

Proceedings Article | 26 May 2022 Presentation + Paper

Ultra-high throughput e-beam inspection for DRAM high aspect ratio storage node defect detection

Tsewen Huang, Shueming Chen, Kevin Hsiao, Steve Lin, Ray Fei, Yufei Duan, Kevin Gao, Luke Lin, Selena Chen

Proceedings Volume 12053, 120530J (2022) https://doi.org/10.1117/12.2617685

KEYWORDS: Defect detection, Inspection, Transmission electron microscopy, Signal detection, Sensors, Semiconducting wafers, Scanning electron microscopy, Defect inspection, Data storage

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Proceedings Article | 22 February 2021 Presentation + Paper

Stochastic defect criticality prediction enabled by physical stochastic modeling and massive metrology

ChangAn Wang, Peigen Cao, Maxence Delorme, Jen-Yi Wuu, Jiyou Fu, Fuming Wang, Bob Lin, Yiqiong Zhao, Yi-Hsing Peng, Yongfa Fan, Mu Feng, Bin Cheng, Jen-Shiang Wang, Mark Simmoms, Stefan Hunsche, Oliver Patterson, Kuo-Feng Pao, Abdalmohsen Elmalk, Kevin Gao, Ruochong Fei, Xuefeng Zeng, Xiaolong Zhang

Proceedings Volume 11609, 1160916 (2021) https://doi.org/10.1117/12.2584767

KEYWORDS: Stochastic processes, Pattern recognition, Semiconducting wafers, Wafer inspection, Inspection, Defect detection, Metrology, Failure analysis, Data modeling, Calibration

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Proceedings Article | 18 October 2018 Presentation + Paper

E-beam based EUV mask characterization for studying mask induced wafer effects

Vidya Vaenkatesan, Qing Tian, Emily Gallagher, Jim Wiley, Jo Finders, Michael Kubis, Jan Mulkens, Chiyan Kuan, Kevin Gao

Proceedings Volume 10810, 108100U (2018) https://doi.org/10.1117/12.2502588

KEYWORDS: Photomasks, Semiconducting wafers, Critical dimension metrology, Liquid phase epitaxy, Extreme ultraviolet, Metrology, Cadmium sulfide, Nanoimprint lithography, Inspection, Error analysis

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