Mr. Kiyoshi Shibata Profile

Kiyoshi Shibata

at Semiconductor Leading Edge Technologies Inc

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Publications (1)

Proceedings Article | 24 May 2004 Paper

Influence of line-edge roughness on MOSFET devices with sub-50-nm gates

Kiyoshi Shibata, Naoki Izumi, Kouichirou Tsujita

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534508

KEYWORDS: Line edge roughness, Field effect transistors, Critical dimension metrology, Scanners, Transistors, Lithography, Scanning electron microscopy, Etching, Inspection, Photoresist materials

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