Mr. Chae-Yun Lim Profile

Chae-Yun Lim

at Hanyang Univ

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Publications (1)

Proceedings Article | 26 September 2019 Paper

Pattern dependent distortion and temperature variation in EUV mask

Chung-Hyun Ban, Eun-Sang Park, Ui-Jeong Ha, Chae-Yun Lim, Hye-Keun Oh

Proceedings Volume 11147, 111471R (2019) https://doi.org/10.1117/12.2536721

KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Semiconductors, Cooling systems, High volume manufacturing, Pellicles, Mirrors, Overlay metrology

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