Dr. Libor Juha
head of the Department at Institute of Physics of the CAS vvi
SPIE Involvement:
Editor | Author
Publications (62)

Proceedings Article | 8 June 2023 Presentation
Ludek Vyšín, Jaromír Chalupský, Věra Hájková, Zuzana Kuglerová, Ladislav Fekete, Lydia Rush, Libor Juha, Jorge Rocca, Carmen Menoni
Proceedings Volume PC12582, PC125820F (2023) https://doi.org/10.1117/12.2666755
KEYWORDS: Extreme ultraviolet, Molecular lasers, Mass spectrometry, Laser ablation, Solids, Molecular spectroscopy, Ions, Spectroscopy, Polymethylmethacrylate, Materials processing

Proceedings Article | 6 June 2023 Presentation
Šimon Jelínek, Tomáš Burian, Jan Dostál, Roman Dudžák, Věra Hájková, Libor Juha, Michal Krupka, Zuzana Kuglerová, Thomas Baumann, Simon Dold, Tommaso Mazza, Yevheniy Ovcharenko, Sergey Usenko, Michael Meyer, Jaromír Chalupský
Proceedings Volume 12578, 125780B (2023) https://doi.org/10.1117/12.2670501
KEYWORDS: Laser ablation, Visible radiation, X-rays, X-ray characterization, Quantum systems, Laser damage threshold, Ablation, Pulsed laser operation, Laser systems engineering, Laser radiation

Proceedings Article | 6 June 2023 Presentation
Proceedings Volume 12578, 125780K (2023) https://doi.org/10.1117/12.2670421
KEYWORDS: Laser ablation, Machine learning, Image processing, Beam analyzers, Optical components, Image segmentation, Deep learning

Proceedings Article | 6 June 2023 Presentation
Zuzana Kuglerová, Jaromír Chalupský, Roman Dudžák, Tomáš Burian, Mikako Makita, Patrik Vagovic, Libor Juha
Proceedings Volume 12578, 1257804 (2023) https://doi.org/10.1117/12.2670111
KEYWORDS: Ultraviolet radiation, Solids, Laser radiation, X-ray lasers, Thermal imaging cameras, Temperature distribution, Pulsed laser operation, Near infrared, Forward looking infrared, Excimer lasers

Proceedings Article | 6 June 2023 Presentation
Proceedings Volume 12578, 125780D (2023) https://doi.org/10.1117/12.2665993
KEYWORDS: Extreme ultraviolet lithography, Laser processing, X-rays, Reflectivity, Plasma, Photomasks, Manufacturing, Extreme ultraviolet, Electronic components, Electronic circuits

Showing 5 of 62 publications
Proceedings Volume Editor (9)

SPIE Conference Volume | 12 May 2021

SPIE Conference Volume | 10 July 2017

SPIE Conference Volume | 1 June 2015

Showing 5 of 9 publications
Conference Committee Involvement (10)
Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam9)
7 April 2025 | Prague, Czech Republic
Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam8)
24 April 2023 | Prague, Czech Republic
EUV and X-ray Optics, Sources, and Instrumentation
19 April 2021 | Online Only, Czech Republic
Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam7)
1 April 2019 | Prague, Czech Republic
Damage to VUV, EUV, and X-ray Optics (XDam6)
24 April 2017 | Prague, Czech Republic
Showing 5 of 10 Conference Committees
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