Dr. Linfei Gao Profile

Dr. Linfei Gao

at KLA China

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Author

Publications (3)

Proceedings Article | 26 May 2022 Poster + Paper

A novel target optimization methodology for 3D NAND overlay measurement improvement

Shuang Xie, Dake Hu, Jeff Zhang, Xuewen Liu, Yu Ni, Lingyi Guo, Linfei Gao, Hajaj Eitan, Jincheng Pei, Jin Zhu, Kevin Huang

Proceedings Volume 12053, 120531X (2022) https://doi.org/10.1117/12.2613927

KEYWORDS: 3D metrology, Photovoltaics, Overlay metrology, 3D acquisition, Metrology, Optical parametric oscillators, Opacity, Semiconducting wafers, Virtual reality, Photomasks

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Proceedings Article | 20 March 2020 Paper

OPO residuals improvement with imaging metrology for 3D NAND

Shlomit Katz, Anna Golotsvan, Yoav Grauer, Efi Megged, Greg Gray, Fiona (Shuk Fan) Leung, Pek Beng Ong, Shi Lei, Jeremy (Shi-Ming) Wei, Wayne (Wei) Zhou, Linfei Gao

Proceedings Volume 11325, 113252J (2020) https://doi.org/10.1117/12.2551874

KEYWORDS: Overlay metrology, Semiconducting wafers, 3D acquisition, 3D image processing, Imaging metrology, Scanning electron microscopy, Optimization (mathematics), Photovoltaics

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Proceedings Article | 26 March 2019 Presentation + Paper

Process drift compensation by tunable wavelength homing in scatterometry-based overlay

Kun Gao, Pedro Herrera, Vidya Ramanathan, Victoria Naipak, Meng Wang, Renan Milo, Tal Yaziv, Nir BenDavid, Chen Dror, Hao Mei, Weihua Li, Xindong Gao, Linfei Gao, Md. Motasim Bellah, Karsten Gutjahr, Dongyue Yang, Cheuk Wun Wong, Xueli Hao, Tony Joung, DeNeil Park, Yue Zhou, Abhishek Gottipati

Proceedings Volume 10959, 1095906 (2019) https://doi.org/10.1117/12.2514548

KEYWORDS: Overlay metrology, Scatterometry, Process control

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