Dr. Lukasz Nieradko Profile

Dr. Lukasz Nieradko

at Wroclawskie Centrum Badan EIT+ sp z o o

SPIE Involvement:

Author

Publications (18)

Proceedings Article | 14 May 2010 Paper

Level set method for microfabrication simulations

Maciej Baranski, Rafal Kasztelanic, Jorge Albero, Lukasz Nieradko, Christophe Gorecki

Proceedings Volume 7716, 77161W (2010) https://doi.org/10.1117/12.853836

KEYWORDS: Etching, Silicon, Data modeling, Microfabrication, Finite element methods, Interfaces, Glasses, Wet etching, Process modeling, Diffusion

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Proceedings Article | 11 August 2008 Paper

Twymann Green interferometry in study of AlN material as an actuation layer in MEMS

C. Gorecki, K. Krupa, A. Andrei, M. Jozwik, L. Nieradko, P. Delobelle, L. Hirsinger

Proceedings Volume 7064, 706402 (2008) https://doi.org/10.1117/12.796072

KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Microelectromechanical systems, Silicon, Electrodes, Thin films, Actuators, Scanning electron microscopy, Multilayers

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SPIE Journal Paper | 1 July 2008

New approach of fabrication and dispensing of micromachined cesium vapor cell

Lukasz Nieradko, Christophe Gorecki, Adel Douahi, Vincent Giordano, Jean-Charles Beugnot, Jan Dziuban, Marco Moraja

JM3, Vol. 7, Issue 03, 033013, (July 2008) https://doi.org/10.1117/12.10.1117/1.2964288

KEYWORDS: Cesium, Absorption, Silicon, Glasses, Atomic clocks, Semiconducting wafers, Etching, Modulation, Microelectromechanical systems, Chemical species

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Proceedings Article | 20 May 2008 Paper

Integrated optic Michelson interferometer for sensors application

P. Marć, C. Gorecki, Ł. Nieradko

Proceedings Volume 6995, 69950A (2008) https://doi.org/10.1117/12.780791

KEYWORDS: Silicon, Waveguides, Atomic force microscopy, Integrated optics, Oxides, Mirrors, Michelson interferometers, Interferometers, Actuators, Matrices

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Proceedings Article | 14 May 2008 Paper

Si moulds for glass and polymer microlenses replication

J. Albero, L. Nieradko, C. Gorecki, H. Ottevaere, V. Gomez, J. Pietarinen

Proceedings Volume 6992, 69920A (2008) https://doi.org/10.1117/12.783093

KEYWORDS: Etching, Silicon, Microlens, Glasses, Anisotropic etching, Semiconducting wafers, Photomasks, Polymers, Isotropic etching, Optical lithography

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Proceedings Article | 25 April 2008 Paper

Characterization of MEMS cantilevers using lensless digital holographic microscope

Vijay Raj Singh, Alexandru Andrei, Christophe Gorecki, Lukasz Nieradko, Anand Asundi

Proceedings Volume 6995, 69950F (2008) https://doi.org/10.1117/12.782981

KEYWORDS: Digital holography, 3D image reconstruction, Holography, Holograms, Microscopes, Microelectromechanical systems, Aluminum nitride, Beam splitters, Vibrometry, Charge-coupled devices

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Proceedings Article | 25 April 2008 Paper

AlN driven microcantilever actuators: modeling, fabrication, characterization

K. Krupa, M. Józwik, A. Andrei, Ł. Nieradko, C. Gorecki, P. Delobelle, L. Hirsinger

Proceedings Volume 6995, 69950E (2008) https://doi.org/10.1117/12.781262

KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Silicon, Actuators, Microelectromechanical systems, Electrodes, Multilayers, Thin films, Silicon films

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Proceedings Article | 9 May 2006 Paper

Reliability studies of micro-optical components in NEMO

F. Berghmans, M. Van Uffelen, S. Eve, E. Ernst, A. Last, D. Rabus, N. Huber, O. Kraft, A. Andrei, L. Nieradko, K. Krupa, M. Jozwik, C. Gorecki, L. Hirsinger, P. Delobelle, P. Kniazewski, L. Salbut, M. Kujawinska

Proceedings Volume 6193, 61930A (2006) https://doi.org/10.1117/12.662001

KEYWORDS: Refractive index, Reliability, Aluminum nitride, Metals, Optical fibers, Microelectromechanical systems, Tomography, Micro optics, Gold, Glasses

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Proceedings Article | 28 April 2006 Paper

Fabrication, characterization, and reliability study of AlN-driven cantilevers

A. Andrei, K. Krupa, M. Jozwik, L. Nieradko, C. Gorecki, L. Hirsinger, P. Delobelle

Proceedings Volume 6188, 61880S (2006) https://doi.org/10.1117/12.663526

KEYWORDS: Aluminum nitride, Metals, Reliability, Interferometry, Etching, Reactive ion etching, Microelectromechanical systems, Aluminum, Electrodes, Silicon

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Proceedings Article | 21 April 2006 Paper

New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Sylwester Bargiel, Lukasz Nieradko, Michal Józwik, Christophe Gorecki, Jan Dziuban

Proceedings Volume 6186, 618602 (2006) https://doi.org/10.1117/12.663770

KEYWORDS: Microlens, Silicon, Microscopes, Glasses, Confocal microscopy, Vertical cavity surface emitting lasers, 3D scanning, Etching, Actuators, Microopto electromechanical systems

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SPIE Journal Paper | 1 April 2006

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror

Lukasz Nieradko, Christophe Gorecki, Michal Józwik, Andrei Sabac, Rolf Hoffmann, Andreas Bertz

JM3, Vol. 5, Issue 02, 023009, (April 2006) https://doi.org/10.1117/12.10.1117/1.2203366

KEYWORDS: Micromirrors, Waveguides, Silicon, Integrated optics, Semiconducting wafers, Mirrors, Photomasks, Sensors, Packaging, Etching

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Proceedings Article | 12 October 2005 Paper

Dynamic measurements of actuators driven by AlN layers

Jacek Kacperski, Malgorzata Kujawinska, Sergio Camacho Leon, Lukasz Nieradko, Michal Jozwik, Christophe Gorecki

Proceedings Volume 5958, 59580J (2005) https://doi.org/10.1117/12.622853

KEYWORDS: Liquid crystal on silicon, Interferometry, Finite element methods, Actuators, Aluminum nitride, Interferometers, Beam shaping, Phase shifts, Electrodes, Microelectromechanical systems

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Proceedings Article | 1 July 2005 Paper

Optical microlenses for MOEMS

Roberto Carasco, Jan Dziuban, Ignacio Moreno, Christophe Gorecki, Lukasz Nieradko, Rafal Walczak, Malgorzata Kopytko, Michal Jozwik

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.607912

KEYWORDS: Etching, Glasses, Silicon, Microlens, Semiconducting wafers, Spherical lenses, Polishing, Photomasks, Anisotropic etching, Microopto electromechanical systems

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Proceedings Article | 22 January 2005 Paper

Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer

Christophe Gorecki, Lukasz Nieradko, Andrei Sabac, Michal Jozwik, Alain Jackobelli, Thierry Dean, Rolf Hoffman, Andreas Bertz

Proceedings Volume 5719, (2005) https://doi.org/10.1117/12.592237

KEYWORDS: Waveguides, Mirrors, Sensors, Silicon, Refractive index, Microelectromechanical systems, Integrated optics, Micromirrors, Transducers, Mach-Zehnder interferometers

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Proceedings Article | 24 January 2004 Paper

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a moveable micromirror

Lukasz Nieradko, Christophe Gorecki, Andrei Sabac, Rolf Hoffmann, Andreas Bertz

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.524726

KEYWORDS: Waveguides, Mirrors, Micromirrors, Silicon, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Integrated optics, Microelectromechanical systems, Wafer-level optics, Mach-Zehnder interferometers

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Proceedings Article | 15 April 2003 Paper

Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide

Lukasz Nieradko, Christophe Gorecki, Andrei Sabac, Jean Jeannot

Proceedings Volume 4943, (2003) https://doi.org/10.1117/12.468517

KEYWORDS: Chromium, Semiconducting wafers, Photomasks, Silicon, Optical lithography, Mach-Zehnder interferometers, Waveguides, Metals, Etching, Fiber optics

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Proceedings Article | 3 April 2003 Paper

Silicon oxynitride waveguides developed for optomechanical sensing functions

Andrei Sabac, Michal Jozwik, Lukasz Nieradko, Christophe Gorecki

Proceedings Volume 4944, (2003) https://doi.org/10.1117/12.468293

KEYWORDS: Waveguides, Silicon, Refractive index, Plasma enhanced chemical vapor deposition, Integrated optics, Microelectromechanical systems, Thin films, Modulation, Micromachining, Silica

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Proceedings Article | 8 August 2001 Paper

Silicon components for gas chromatograph

Jan Dziuban, Anna Gorecka-Drzazga, Krzysztof Malecki, Lukasz Nieradko, Jerzy Mroz, Malgorzata Szczygielska

Proceedings Volume 4516, (2001) https://doi.org/10.1117/12.435932

KEYWORDS: Silicon, Sensors, Glasses, Semiconducting wafers, Capillaries, Chromatography, Control systems, Mining, Resistance, Platinum

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Showing 5 of 18 publications

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