Dr. Mana Taghdiri
at Nanoscribe GmbH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 June 2024 Presentation
Mareike Trappen, Matthias Blaicher, Tobias Hoose, Nicole Lindenmann, Stephan Dottermusch, Andrea Bertoncini, Philipp Rayling, Kai Sandfort, Roman Rainer, Fabian Niesler, Michael Thiel, Mana Taghdiri
Proceedings Volume 13024, 130240A (2024) https://doi.org/10.1117/12.3023930

Proceedings Article | 20 May 2022 Presentation
Andrea Bertoncini, Yann Tanguy, Alok Tungal, Nicole Lindenmann, Timo Sartor, Roman Reiner, Matthias Blaicher, Sebastian Fisher, Mana Taghdiri, Fabian Niesler, André Radke, Michael Thiel
Proceedings Volume PC12135, PC1213501 (2022) https://doi.org/10.1117/12.2620974
KEYWORDS: Grayscale lithography, Spatial resolution, Nanotechnology, Nanoimprint lithography, Mask making, Lithography

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