Prof. Manfred Schrenk Profile

Prof. Manfred Schrenk

at JENOPTIK Optical Systems GmbH

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 7 March 2007 Paper

Challenging micro-optical applications demand diverse manufacturing solutions

Gregg Borek, Peter Weissbrodt, Manfred Schrenk, Matthias Cumme

Proceedings Volume 6462, 64620X (2007) https://doi.org/10.1117/12.715022

KEYWORDS: Optics manufacturing, Optical components, Optical lithography, Near field optics, Micro optics, Manufacturing, Chemical elements, Lithography, Electron beam lithography, Photomasks

Read Abstract +

Proceedings Article | 15 October 2005 Paper

Combined elements for beam shaping and polarization management

Matthias Cumme, Peter Triebel, Dirk Mademann, Manfred Schrenk, Peter Weissbrodt

Proceedings Volume 5962, 59621B (2005) https://doi.org/10.1117/12.625206

KEYWORDS: Beam shaping, Polarization, Optical components, Near field optics, Polarizers, Optical testing, Near field, Lithographic illumination, Silica, Binary data

Read Abstract +

Proceedings Article | 12 May 2005 Paper

Polarization gratings for the DUV: modeling and experimental results

P. Triebel, D. Mademann, M. Schrenk, P. Weissbrodt

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598724

KEYWORDS: Polarization, Diffraction gratings, Dielectric polarization, Diffraction, Multiplexing, Optical properties, Deep ultraviolet, Optical design, Chemical elements, Binary data

Read Abstract +

Proceedings Article | 12 May 2005 Paper

Hot spot free diffractive DUV-homogenizer for high NA-illumination

Matthias Cumme, Mirko Riethmuller, Dirk Mademann, Manfred Schrenk, Peter Weissbrodt

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598731

KEYWORDS: Diffractive optical elements, Beam shaping, Near field, Lithographic illumination, Silica, Optical alignment, Diffraction, Inspection, Lithography, Control systems

Read Abstract +

Proceedings Article | 10 December 2001 Paper

Degradation of supersmooth surfaces for UV/EUV/x-ray applications in space

Dirk-Roger Schmitt, Helmut Toebben, Gabriele Ringel, Peter Weissbrodt, Manfred Schrenk, L. Raupach, Erich Hacker

Proceedings Volume 4498, (2001) https://doi.org/10.1117/12.450075

KEYWORDS: Space operations, Silver, Aerospace engineering, Resistance, Space telescopes, Satellites, Oxygen, Ultraviolet radiation, Contamination, X-rays

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years