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Dr. Marc Weimer
Senior Research Associate at Brewer Science Inc
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Publications (4)
Proceedings Article | 2 April 2010 Paper
Minimizing the outgassing of spin-coated organic materials to reduce defects
Brandy Carr, April Evers, Marc Weimer, Brian Smith, Jeff Leith
Proceedings Volume 7638, 763823 (2010) https://doi.org/10.1117/12.846102
KEYWORDS: Semiconducting wafers, Particles, Polymers, Quartz, Crystals, Wafer testing, Defect detection, Systems modeling, Organic materials, Scanning electron microscopy
Proceedings Article | 2 April 2007 Paper
Materials for and performance of multilayer lithography schemes
Proceedings Volume 6519, 65192S (2007) https://doi.org/10.1117/12.712342
KEYWORDS: Reflectivity, Silicon, Lithography, System on a chip, Etching, Multilayers, Photomasks, Semiconducting wafers, Plasma etching, Plasma
Proceedings Article | 4 May 2005 Paper
New advanced BARC materials for ultra-high NA applications
James Claypool, Marc Weimer, Vandana Krishnamurthy, Wendy Gehoel, Koen van Ingen Schenau
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599988
KEYWORDS: Reflectivity, Electroluminescence, Line edge roughness, Lithography, Semiconducting wafers, Immersion lithography, Line width roughness, Polarization, Scanning electron microscopy, Lithographic illumination
Proceedings Article | 12 June 2003 Paper
New materials for 193-nm bottom antireflective coatings
Marc Weimer, Vandana Krishnamurthy, Shelly Fowler, Cheryl Nesbit, James Claypool
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485107
KEYWORDS: Chromophores, Reflectivity, Polymers, Silicon, Lithography, Bottom antireflective coatings, Molecules, Critical dimension metrology, Semiconducting wafers, Silicon films
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