Dr. Masoud Babaeian Profile

Dr. Masoud Babaeian

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Publications (2)

Proceedings Article | 18 December 2024 Presentation + Paper

Latent damage in high reflectivity dielectric coatings due to 193nm irradiation

Masoud Babaeian, Zhaoyu Liu, Walt Gillespie, Jue Wang, Gerald Cox

Proceedings Volume 13190, 1319008 (2024) https://doi.org/10.1117/12.3031716

KEYWORDS: Reflectivity, Laser irradiation, Dielectrics, Deep ultraviolet, Laser damage threshold, Optical lithography, Mirrors, Speckle, Semiconductors, Semiconductor manufacturing

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Proceedings Article | 2 December 2022 Presentation + Paper

Hot-spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter

Masoud Babaeian, Eric Mason, Jue Wang, Gerald Cox

Proceedings Volume 12300, 1230006 (2022) https://doi.org/10.1117/12.2641982

KEYWORDS: Beam splitters, Beam analyzers, Antireflective coatings, Excimer lasers, Laser induced damage, Laser applications, Coating

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