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Matthew E. McCarthy
Principle Engineer at ASML Wilton Wilton
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Publications (1)
Proceedings Article | 7 July 1997 Paper
Micrascan III: performance of a third-generation catadioptric step-and-scan lithographic tool
Daniel Cote, Keith Andresen, David Cronin, Hilary Harrold, Marc Himel, J. Kane, Joe Lyons, Louis Markoya, Christopher Mason, Diane McCafferty, Matthew McCarthy, Geoffrey O'Connor, Harry Sewell, David Williamson
Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.276001
KEYWORDS: Combined lens-mirror systems, Lithography, Imaging systems, Optical lithography, Reticles, Semiconducting wafers, Fiber optic illuminators, Image resolution, Image quality
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