Mr. Michihiro Kawaguchi Profile

Michihiro Kawaguchi

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Multi-beam mask writer MBM-3000 for next generation EUV mask production

Hiroshi Matsumoto, Jumpei Yasuda, Tomoo Motosugi, Hayato Kimura, Michihiro Kawaguchi, Yoshinori Kojima, Hiroshi Yamashita, Masato Saito, Takao Tamura, Noriaki Nakayamada

Proceedings Volume 12751, 127510X (2023) https://doi.org/10.1117/12.2687415

KEYWORDS: Extreme ultraviolet, Electron beam lithography, Projection lithography, Resolution enhancement technologies, Distortion, Mask making

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