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Miky Yeh
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Publications (1)
Proceedings Article | 9 April 2024 Poster + Paper
Study of acicular defects in the post-exposure bake process airborne molecular contamination
Yuan Hsu, David Wang, Miky Yeh
Proceedings Volume 12957, 129571I (2024) https://doi.org/10.1117/12.3009744
KEYWORDS: Tunable filters, Contamination, Image processing, Particles, Photoresist processing, Inspection, Mask cleaning, Environmental sensing, Protactinium, Polymers
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