WS2 flakes were prepared on template-stripped ultra-flat Au and Ag layers using a metal-assisted exfoliation technique, and their physical characteristics were investigated. The identification of the thickness for each flake is confirmed by the agreement between the measured and calculated optical reflectance spectra. Despite the extremely small flake thickness, the resonant cavity modes can appear in WS2/Au and WS2/Ag, according to the anticipated phase shifts of light. The contact potential difference of the flake was studied using Kelvin probe force microscopy to propose the interfacial band alignment. This work can provide valuable insights into the use of the 2D-semiconductor/metal structures for optoelectronic device applications.
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