Dr. Nan Zhao Profile

Dr. Nan Zhao

at ASML-HMI

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Publications (1)

Proceedings Article | 26 March 2019 Paper

An optimized parameter guidance system for line/space CD metrology

Nan Zhao, Lingling Pu, Teng Wang, Wentian Zhou, Ming Xu, Wei Fang, Brian Lee

Proceedings Volume 10959, 1095923 (2019) https://doi.org/10.1117/12.2515021

KEYWORDS: Scanning electron microscopy, Metrology, Critical dimension metrology, Computer simulations, Imaging systems, Image quality, Monte Carlo methods, Detection and tracking algorithms, Model-based design, Image analysis

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