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Dr. Nancy Iwamoto
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Author
Publications (4)
Proceedings Article | 11 September 2007 Paper
Dielectric constant trends in silicate spin-on glasses
Nancy Iwamoto, Tao Li, Jelena Sepa, Ahila Krishnamoorthy
Proceedings Volume 6645, 66452A (2007) https://doi.org/10.1117/12.736492
KEYWORDS: Dielectrics, Silicon, Silicates, Thin films, Quartz, Glasses, Microelectronics, Data modeling, Microelectromechanical systems, FT-IR spectroscopy
Proceedings Article | 4 May 2005 Paper
Organosiloxane based bottom antireflective coating for 193nm lithography
Bo Li, Kim Do, Jason Stuck, Songyuan Xie, Roger Leung, Tiffany Nguyen, Jaswinder Gill, Lei Jin, Wenya Fan, Shilpa Thanawala, Faith Zhou, Nancy Iwamoto, Emma Brouk, Joseph Kennedy
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600015
KEYWORDS: Etching, Plasma etching, Photoresist materials, Plasma, Optical lithography, Polymers, Reflectivity, Wet etching, Lithography, Silicon
Proceedings Article | 12 June 2003 Paper
Organosiloxane-based bottom antireflective coatings for 193-nm lithography
Joseph Kennedy, Teresa Baldwin-Hendricks, Jason Stuck, Arlene Suedmeyer, Shilpa Thanawala, Kim Do, Nancy Iwamoto
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485158
KEYWORDS: Etching, Plasma etching, Plasma, Reflectivity, Optical lithography, Photoresist materials, Lithography, Copper, Silicon carbide, Dielectrics
Proceedings Article | 27 April 1993 Paper
Relative stabilities and self-alignment tendencies of peptide-based NLO materials
Proceedings Volume 1853, (1993) https://doi.org/10.1117/12.144053
KEYWORDS: Hydrogen, Nonlinear optics, Chromophores, Polymers, Resistance, Chemical species, Deposition processes, Biological research, Chemistry, Warfare
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