Ms. Nanoka Miyahara Profile

Nanoka Miyahara

at Tokyo Electron Kyushu Ltd

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Publications (2)

Proceedings Article | 1 May 2023 Poster + Paper

Fundamentals of EUV stack for improving patterning performance

Nanoka Miyahara, Soichiro Okada, Hiroyuki Fujii, Satoru Shimura

Proceedings Volume 12498, 124981E (2023) https://doi.org/10.1117/12.2657056

KEYWORDS: Tin, Extreme ultraviolet, Optical lithography, Silicon carbide, Spin on carbon materials, Lithography, Extreme ultraviolet lithography, Amorphous carbon

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Proceedings Article | 1 May 2023 Poster + Paper

Establishment of new process technology for EUV lithography

Yuhei Kuwahara, Shinichiro Kawakami, Kanzo Kato, Soichiro Okada, Yuya Kamei, Tomoya Onitsuka, Takashi Yamauchi, Nanoka Miyahara, Congque Dinh, Lior Huli, Satoru Shimura

Proceedings Volume 12498, 124981F (2023) https://doi.org/10.1117/12.2657076

KEYWORDS: Line width roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Line edge roughness, Etching, Solubility, High volume manufacturing, Silicon carbide, Silicon, Scanning electron microscopy

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