Nathan D. Jarnagin
Scientist at KLA Corp
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 5 April 2013 Paper
Proceedings Volume 8680, 86801X (2013) https://doi.org/10.1117/12.2021420
KEYWORDS: Polymers, Annealing, Polymerization, Scanning electron microscopy, Picosecond phenomena, Thin films, Nitrogen, Directed self assembly, Polymer thin films, Glasses

Proceedings Article | 5 April 2013 Paper
Proceedings Volume 8680, 86801W (2013) https://doi.org/10.1117/12.2021417
KEYWORDS: Polymers, Annealing, Lithography, FT-IR spectroscopy, Optical lithography, Etching, Magnesium, Solids, Polymerization, Directed self assembly

Proceedings Article | 5 April 2013 Paper
Proceedings Volume 8680, 86801V (2013) https://doi.org/10.1117/12.2021414
KEYWORDS: Annealing, Polymers, Scanning electron microscopy, Picosecond phenomena, Silicon, Semiconducting wafers, Etching, Polymerization, Solids, Directed self assembly

Proceedings Article | 16 April 2012 Paper
Proceedings Volume 8323, 832310 (2012) https://doi.org/10.1117/12.918081
KEYWORDS: Polymerization, Polymers, Optical lithography, Lithography, Scanning electron microscopy, Annealing, Molecular self-assembly, Directed self assembly, Glasses, FT-IR spectroscopy

Proceedings Article | 16 April 2012 Paper
Proceedings Volume 8323, 83232R (2012) https://doi.org/10.1117/12.918073
KEYWORDS: Polymers, Optical lithography, Lithography, Etching, Polymerization, Plasma etching, Annealing, Solids, Plasma, Directed self assembly

Showing 5 of 9 publications
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