The publication describes the application of subaperture correction technologies for the fabrication of high-end aspheres and freeforms. In addition to the established processes grinding and polishing, technologies such as diamond turning and smoothing polishing to reduce mid-spatial frequency errors will be examined. The presentation focuses on the technology chain necessary for the production of high-precision aspherical components. The final correction of surface errors of optical components with the help of subaperture finishing tools MRF (magneto-rheological finishing) and IBF (ion beam finishing) will be described. Besides the increased demands on machining processes the accuracy of measuring procedures is becoming more and more important. “Pixel-precise” measuring is the basis for realization of higher demands. The impact of alignment errors (coma, spherical aberration, twist) on form accuracy is discussed. Results will be presented taken from the manufacturing of two strong aspheres.
Precision optical elements are used in a wide range of technical instrumentations. Many optical systems e.g. semiconductor inspection modules, laser heads for laser material processing or high end movie cameras, contain precision optics even aspherical or freeform surfaces. Critical parameters for such systems are wavefront error, image field curvature or scattered light. Following these demands the lens parameters are also critical concerning power and RMSi of the surface form error and micro roughness. How can we reach these requirements? The emphasis of this discussion is set on the application of subaperture correction technologies in the fabrication of high-end aspheres and free-forms. The presentation focuses on the technology chain necessary for the production of high-precision aspherical optical components and the characterization of the applied subaperture finishing tools MRF (magneto-rheological finishing) and IBF (ion beam figuring). These technologies open up the possibility of improving the performance of optical systems.
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