Dr. Olivier Soppera
at Institut de Sciences des Materiaux de Mulhouse
SPIE Involvement:
Conference Program Committee | Author
Publications (21)

Proceedings Article | 5 October 2023 Presentation
Proceedings Volume PC12652, PC1265204 (2023) https://doi.org/10.1117/12.2682841
KEYWORDS: Zinc oxide, Photoluminescence, Metal oxides, Materials properties, Deep ultraviolet, Spectroscopy, Semiconductors, Optoelectronics, Optoelectronic devices, Optical lithography

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 1249818 (2023) https://doi.org/10.1117/12.2658423
KEYWORDS: Semiconducting wafers, Silicon, Deep ultraviolet, Lithography, Photoacid generators, Photoresist processing, Plasma etching, Etching, Optical lithography, Film thickness, Sustainability

Proceedings Article | 20 March 2018 Presentation + Paper
Mathieu Caillau, Céline Chevalier, Pierre Crémillieu, Thierry Delair, Olivier Soppera, Benjamin Leuschel, Cédric Ray, Christophe Moulin, Christian Jonin, Emmanuel Benichou, Pierre-François Brevet, Christelle Yeromonahos, Emmanuelle Laurenceau, Yann Chevolot, Jean-Louis Leclercq
Proceedings Volume 10587, 105870S (2018) https://doi.org/10.1117/12.2292312
KEYWORDS: Biopolymers, Electron beam lithography, Lithography, Optical lithography, Silicon, Silica, Etching, Absorbance, Polymers, Ultraviolet radiation, Polymethylmethacrylate

Proceedings Article | 28 September 2015 Paper
Proceedings Volume 9634, 96342K (2015) https://doi.org/10.1117/12.2195207
KEYWORDS: Particles, Polymers, Optical fibers, Optical tweezers, Yeast, Polymer optical fibers, Fiber optics, Polymerization, Modulation, Computer simulations

Proceedings Article | 10 March 2015 Paper
Proceedings Volume 9379, 93790N (2015) https://doi.org/10.1117/12.2079798
KEYWORDS: Yeast, Optical fibers, Lenses, Particles, Polymers, Spherical lenses, Ion beams, Optical tweezers, Scanning electron microscopy, Fiber optics

Showing 5 of 21 publications
Conference Committee Involvement (6)
UV and Higher Energy Photonics: From Materials to Applications 2024
18 August 2024 | San Diego, California, United States
UV and Higher Energy Photonics: From Materials to Applications 2023
20 August 2023 | San Diego, California, United States
UV and Higher Energy Photonics: From Materials to Applications 2022
21 August 2022 | San Diego, California, United States
UV and Higher Energy Photonics: From Materials to Applications 2021
2 August 2021 | San Diego, California, United States
UV and Higher Energy Photonics: From Materials to Applications 2020
25 August 2020 | Online Only, California, United States
Showing 5 of 6 Conference Committees
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