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Dr. Patricia B. Smith
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Publications (4)
Proceedings Article | 12 July 2002 Paper
248-nm photolithography compatibility on low-k dielectrics in BEOL interconnects
Hyesook Hong, Guoqiang Xing, Andrew Mckerrow, Tae Kim, Patricia Smith
Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475693
KEYWORDS: Critical dimension metrology, Plasma, Dielectrics, Optical lithography, Photoresist materials, Nitrogen, Semiconducting wafers, Cadmium, Scanning electron microscopy, Etching
Proceedings Article | 23 November 1999 Paper
Integrated fault detection capability for Spreeta biosensors
Jose Melendez, Dwight Bartholomew, Richard Carr, Michael Sciascia, Patricia Smith, Anita Strong, Jerome Elkind
Proceedings Volume 3856, (1999) https://doi.org/10.1117/12.371302
KEYWORDS: Biosensors, Sensors, Refractive index, Calibration, Clocks, Surface plasmons, Chemical analysis, Imaging systems, Interfaces, Plasmons
Proceedings Article | 13 July 1994 Paper
Spectroscopic ellipsometry as a real-time sensor for the fabrication of infrared photodiodes
Proceedings Volume 2228, (1994) https://doi.org/10.1117/12.179675
KEYWORDS: Sensors, Infrared sensors, Infrared radiation, Spectroscopic ellipsometry, Infrared photography, Infrared spectroscopy, Photodiodes, Microelectronics, Manufacturing, Mercury cadmium telluride
Proceedings Article | 12 August 1992 Paper
In-situ monitoring for HgCdTe device fabrication
Patricia Smith, Glennis Orloff, Roger Strong
Proceedings Volume 1683, (1992) https://doi.org/10.1117/12.137778
KEYWORDS: Etching, Mercury cadmium telluride, Plasma etching, Plasma, Zinc, Contamination, Reactive ion etching, Oxides, Ellipsometry, Process control
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