The spectacular growth in MOEMS interest is highlighted by the involvement of R&D centres and industrial companies. A lot of application fields offer large opportunities for Micro-Opto-Electro- Mechanical Systems (MOEMS): optical communications (switches, cross- connect matrix, DWDM systems ...), digital image processing, adaptive optics... but also industrial maintenance, environment, medicine,... After general ideas on MEMS and MOEMS, this paper presents the main application fields for MOEMS and a few outstanding devices are presented to illustrate the recent developments. Then the work of LETI in MOEMS is presented. Some devices are fabrication with MEMS technologies such as tunable Fabry-Perot interferometers for DWDM telecommunications or 2D micro-scanners for obstacle detection. But a more specific technology has also been developed by LETI, resulting in devices made of silica such as 1D micro-scanners for obstacle detection. Moreover some devices are constituted of micro-mechanical structures combined with Integrated Optics: micro-switches for protection applications and network reconfiguration in optical communications, micro-vibration sensor for surveillance of rotating machines in electrical generators.
The spectacular growth in MOEMS interest is highlighted by the involvement of R&D centres and industrial companies. A lot of application fields offer large opportunities for Micro-Opto-Electro- Mechanical Systems (MOEMS): optical communications (switches, cross- connect matrix, DWDM systems ...), digital image processing, adaptive optics... but also industrial maintenance, environment, medicine,... After general ideas on MEMS and MOEMS, this paper presents the main application fields for MOEMS and a few outstanding devices are presented to illustrate the recent developments. Then the work of LETI in MOEMS is presented. Some devices are fabrication with MEMS technologies such as tunable Fabry-Perot interferometers for DWDM telecommunications or 2D micro-scanners for obstacle detection. But a more specific technology has also been developed by LETI, resulting in devices made of silica such as 1D micro-scanners for obstacle detection. Moreover some devices are constituted of micro-mechanical structures combined with Integrated Optics: micro-switches for protection applications and network reconfiguration in optical communications, micro-vibration sensor for surveillance of rotating machines in electrical generators.
The spectacular growth in MOEMS interest is highlighted by the involvement of R&D centres and industrial companies. A lot of application fields offer large opportunities for Micro-Opto-Electro- Mechanical Systems (MOEMS): optical communications (switches, cross- connect matrix, DWDM systems ...), digital image processing, adaptive optics... but also industrial maintenance, environment, medicine,... After general ideas on MEMS and MOEMS, this paper presents the main application fields for MOEMS and a few outstanding devices are presented to illustrate the recent developments. Then the work of LETI in MOEMS is presented. Some devices are fabrication with MEMS technologies such as tunable Fabry-Perot interferometers for DWDM telecommunications or 2D micro-scanners for obstacle detection. But a more specific technology has also been developed by LETI, resulting in devices made of silica such as 1D micro-scanners for obstacle detection. Moreover some devices are constituted of micro-mechanical structures combined with Integrated Optics: micro-switches for protection applications and network reconfiguration in optical communications, micro-vibration sensor for surveillance of rotating machines in electrical generators.
The spectacular growth in MOEMS interest is highlighted by the involvement of R&D centres and industrial companies. A lot of application fields offer large opportunities for Micro-Opto-Electro- Mechanical Systems (MOEMS): optical communications (switches, cross- connect matrix, DWDM systems ...), digital image processing, adaptive optics... but also industrial maintenance, environment, medicine,... After general ideas on MEMS and MOEMS, this paper presents the main application fields for MOEMS and a few outstanding devices are presented to illustrate the recent developments. Then the work of LETI in MOEMS is presented. Some devices are fabrication with MEMS technologies such as tunable Fabry-Perot interferometers for DWDM telecommunications or 2D micro-scanners for obstacle detection. But a more specific technology has also been developed by LETI, resulting in devices made of silica such as 1D micro-scanners for obstacle detection. Moreover some devices are constituted of micro-mechanical structures combined with Integrated Optics: micro-switches for protection applications and network reconfiguration in optical communications, micro-vibration sensor for surveillance of rotating machines in electrical generators.
We give a quick overview of MOEMS technologies under development at LETI. We mainly focus on recent developments in relation with the 'Europractice Competence Center Number 3' dedicated to MOEMS whose LETI is the coordinator. MOEMS are optical devices offering simultaneously optical and mechanical functions, and achieved in a collective manner by means of microelectronics like process and machines. Different devices and demonstrators already exist at LETI such as micro-switches for optical fiber networks, vibration sensors, scanning devices for laser or are under development such as tunable Fabry-Perot interferometers. Examples and performances are presented.
The reliability of rotating machines such as electrical generator is critical to the overall reliability and operation ofelectrical power plants. The very high cost ofthese machines, makes it necessary to improve the lifetime of a wide set of currently installed hydrogenerators around the world and avoid costly maintenance.
We give a quick overview of what and where in Europe new MOEMS technologies and products are arriving. We will mainly focus on developments funded by the European Community and especially on Europractice II partners existing products and technologies and particularly on the Competence Center Number 3 whose LETI and the authors are the coordinator.
A 1:2 Micro-Opto-Mechanical switch has been achieved using the combination of 2 technologies: `Integrated Optics' and `Micromachining on Silicon'. The commutation is obtained by means of the mechanical deflection of a cantilever beam driven by an electrostatic force. The first devices show promising characteristics.
An integrated optical circuit (IOC) combining all the detection functions of a standard magneto-optical reading head (MO reading, focus and tracking control) is presented. The reading function is achieved by means of a patented interferometric circuit. For tracking control, the well-known push-pull method has been applied and adapted to integrated optics. In this case, the role of the IOC is just to separate the beam reflected back from the disc in two halves in order to compare their intensity. For focus control, several principles have been tested: standard ones adapted to integrated optics (`wax-wane' method or Foucault knife-edge) and an original method based on multimode interferences, taking benefits of integrated optics specificity. The implemented technology is based on a silicon substrate with a silicon nitride core between two silica cladding layers (Si/SiO2/Si3N4/SiO2). This technology is a low cost technology well adapted for mass production. The optical components of the circuits are made by standard contact photolithography and reactive ion etching. Several wafers with about 50 devices each, have been processed and characterized. In particular, the detection signals have been compared with the detection signals delivered simultaneously by a Philips-IBM 128 MB MO drive. This experiment demonstrates the feasibility of an integrated detection device for MO drive.
Integrated Optics on Silicon substrate (IOS) has appeared very early. This original work was concerned with monolithic integration of waveguides and photodiodes which seemed then to be THE major advantage of silicon. Since these pioneer times, a lot of work has been done and new reasons for the world-wide success of silicon have emerged. We try in the following paper to make a short overview of the possibilities offered by silicon, along with new trends appearing on IOS, each of them trying to overcome the limitation of IOS to passive devices.
Since 1984, infrared sensors devices have been developed in the CEA-LETI laboratories for astronomical observation in the 4-17 micrometers wavelength band using Si:Ga detectors. These devices are to equip ISOCAM, a camera which will operate from ISO (Infrared Space Observatory), the European satellite expected to be launched in May 1993, and C10(mu) , a French astronomical camera which will be based at the CFHT (Canadian French Hawaii Telescope). In this paper, a brief description of the devices and their operating conditions, as well as main preliminary results, are given.
A brief description of IR sensor devices for astronomical observation in the 4-17 micron wavelength band using Si:Ga detectors is given. These devices are to equip ISOCAM, a camera which will operate from the Infrared Space Observatory, the European satellite expected to be launched in May 1993, and C10-mu, a French astronomical camera based at the Canadian French Hawaii Telescope. These sensor devices are polylithic dies: the photoconductor array is hybridized by indium bumps to the readout circuit. Reliability tests show that neither thermal cycles nor strong acceleration or vibrations degrade the mechanical behavior of such a structure. A comparison between ISOCAM and the C10-mu detector is presented in tabular form.
The long-wavelength channel detector of Isocam, a camera aboard the Iso satellite designed to provide 32 x 32 pictures in the 2.5-5.5 micron and 4-17 micron bands, is discussed. The detector, readout circuit, and hybridization technology are addressed, and the main electrooptical measurements are reported. The spatial qualification of the device is briefly addressed.
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