Mr. Prem Kumar Profile

Prem Kumar

at CSIR-CEERI

SPIE Involvement:

Author

Publications (4)

SPIE Journal Paper | 14 December 2018

Reduced dielectric charging RF MEMS capacitive switch

Khushbu Mehta, Deepak Bansal, Anuroop Bajpai, Ashudeep Minhas, Amit Kumar, Maninder Kaur, Prem Kumar, Kamaljit Rangra

JM3, Vol. 17, Issue 04, 045001, (December 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.4.045001

KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Electrodes, Bridges, Switching, Temperature metrology, Metals, Capacitance, Reliability

Read Abstract +

SPIE Journal Paper | 6 October 2016

Fabrication and analysis of radiofrequency MEMS series capacitive single-pole double-throw switch

Prem Kumar, Deepak Bansal, Anuroop Bajpai, Maninder Kaur, Kamaljit Rangra

JM3, Vol. 15, Issue 04, 045001, (October 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.4.045001

KEYWORDS: Switches, Single point diamond turning, Microelectromechanical systems, Gold, Finite element methods, Photoresist materials, Metals, Capacitance, Etching

Read Abstract +

SPIE Journal Paper | 3 September 2015

Design and fabrication of a reduced stiction radio frequency MEMS switch

Deepak Bansal, Anuroop Bajpai, Prem Kumar, Amit Kumar, Maninder Kaur, Kamaljit Rangra

JM3, Vol. 14, Issue 03, 035002, (September 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.035002

KEYWORDS: Switches, Microelectromechanical systems, Metals, Electrodes, Dielectrics, Capacitance, Switching, Oxides, Scanning electron microscopy

Read Abstract +

The design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch are presented. The switch has a resonance frequency of 9.8 kHz with a corresponding switching speed of 46 μs. Use of a floating metal layer and optimal contact area ensures reduced stiction and smaller capacitive leakage. Overall size of the switch is 0.535 (0.50×1.070) mm2. Reduction in up-state capacitance also results in improvement in self-actuation voltage, insertion, and return loss. The optimized topology has improved the stiction and power handling of the switch.

SPIE Journal Paper | 5 February 2014

Comparative study of various release methods for gold surface micromachining

Akshdeep Sharma, Prachi Jhanwar, Deepak Bansal, Amit Kumar, Maninder Kaur, Shilpi Pandey, Prem Kumar, Dinesh Kumar, Kamaljit Rangra

JM3, Vol. 13, Issue 01, 013005, (February 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.013005

KEYWORDS: Plasma, Microelectromechanical systems, Gold, Switches, Surface micromachining, Etching, Semiconducting wafers, Oxygen, Photomicroscopy

Read Abstract +

A comparison of dry and wet release methods for surface micromachining of metallic structures, such as RF MEMS switches, test structures, bridges, and cantilevers is presented. The dry release process is optimized by varying the concentration of O 2 and CF 4 plasma and RF power. The plasma ashing of the sacrificial layer typically results in damage to metallic structures or stress-related deformation due to rise in temperature (>80°C ). A wet release process using critical point drying (CPD) has been investigated to realize gold-electroplated structures with reduced residual stress. The CPD, being a low-temperature (31.1°C) process, is more suitable for compliant structures without any deformation.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

SIGN IN TO:

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Advertisement

Advertisement

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password
Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years