Mr. Rui Sun Profile

Rui Sun

at University of Science and Technology of China

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Proceedings Article | 13 November 2024 Paper

Research on subsurface damages of fused quartz by different grinding methods

Rui Sun, Junhui Die, Huan Li, Jie Liu, Ying Huang, Yunfan Zhang, Jiangchuan Hu, Chao Cai

Proceedings Volume 13280, 132800H (2024) https://doi.org/10.1117/12.3046546

KEYWORDS: Abrasives, Particles, Surface finishing, Fused quartz, Polishing, Optical components, Laser induced damage, Surface roughness, Resistance, Scanning electron microscopy

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Fused quartz material demonstrates strong ultraviolet light transmission and resistance to laser damage, making it the primary choice for selecting large-diameter optical components in high-power laser systems. The challenge now lies in achieving low damages and high resistance to laser damage. A significant number of large-scale (with characteristic depths ranging from 10μm to 100μm) Sub Surface Damages (SSD) are generated in grinding stage, requiring substantial material removal during the subsequent polishing stage to ensure the damage resistance performance of the components. Therefore, it is crucial to study damage control in grinding stage for achieving optimal subsurface quality in optical components. This paper focuses on the processing state of fused quartz components under various grinding processes. Initially, a comparative experiment is conducted using loose abrasive and bonded abrasive with the same grain size (6μm), followed by an examination of three different grain sizes (6μm, 9μm, 20μm) of bonded abrasive grinding processes. After grinding, all processed samples are appropriately etched to reveal subsurface damages. The damage distribution and morphological information of the experimental samples are observed using optical microscopy and scanning electron microscopy. The value of surface roughness (Rz) of the fused quartz samples is measured using white light interferometry, and the corresponding SSD is calculated using the empirical formula of Kun Xiao. The findings indicate that the bonded abrasive processed samples exhibit higher removal efficiency and smaller SSD compared to the loose abrasive samples.

Proceedings Article | 27 March 2022 Paper

Study on subsurface damage of fused quartz in grinding stage

Rui Sun, Ying Huang, Xianhong Zhang, Fang Zhao, Yunfan Zhang, Jie Liu, Jiangchuan Hu

Proceedings Volume 12169, 1216902 (2022) https://doi.org/10.1117/12.2619465

KEYWORDS: Abrasives, Fused quartz, Profilometers, Optical components, Solids, Particles, Surface roughness, Laser induced damage, Resistance, Photomicroscopy

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With the increasing energy of high power laser devices, the laser-induced damage of optical components, especially fused quartz components, has become one of the core problems in the development of high power laser devices. Studies show that pure fused quartz glass has a high intrinsic damage threshold, but fused quartz glass will inevitably introduce a large number of subsurface damage during the process of grinding and polishing, and these subsurface damage is one of the important factors leading to the decline of laser damage resistance of optical components. It is of great significance to study the subsurface damage of solid abrasive for improving the damage resistance threshold of optical components. In this experiment, 3M's abrasive pad is used as a solid abrasive. The subsurface damage of fine grinding elements are directly observed and analyzed by combining HF pickling and optical microscopy. The results show that various subsurface damage can be detected by optical microscopy after HF pickling. Profilometer is used to measure the surface roughness of the sample, the comparative analysis of the subsurface damage of the fine grinding elements shows that the elements with solid abrasive lapping have smaller roughness when the abrasive size is the same, which has a shallower depth of subsurface damage layer correspondingly.

Proceedings Article | 5 November 2020 Paper

Processing of Janus micropillars based on femtosecond laser and vacuum evaporation

Rui Sun

Proceedings Volume 11562, 115620L (2020) https://doi.org/10.1117/12.2577513

KEYWORDS: Femtosecond phenomena, Photoresist materials, Coating, Two photon polymerization, Scanning electron microscopy, Vacuum equipment

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As a new bottom-up processing method, femtosecond laser two-photon polymerization (TPP) technology, has the advantages of simple working environment, high resolution and flexibility, which is widely used in the fields of micro-optical devices, micro-mechanical devices and micro-fluid devices. Structures with different chemical or physical properties on either side are called Janus structures. In particular, when there is difference in expansion coefficient between the two sides of the Janus structure in different external environments, the structure as a whole will show shape changes controlled by the external environment, so processing Janus structure is an important way to achieve structural deformation. The key to prepare the Janus structure is the uniformity of the diprosopic structure itself. At first, we fabricate ordinary micropillars by focusing controllable femtosecond laser into photoresist (SZ2080). Then the vacuum evaporation technology is used to transform the ordinary micropillars into Janus micropillars by steaming metal on one side of the micropillars. These Janus micropillars will have a directional bending towards the side of coating metal. This phenomenon is analyzed theoretically and simulated numerically by COMSOL, which is verified by experiments. Since the thermal expansion coefficients of different materials on both sides of the micropillar are different, these Janus micropillars have the ability to change their shapes with the change of temperature, which have potential applications in temperature drive and temperature sensing.

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