The productivity of waveguide combiner is crucial for augmented reality (AR) devices. Nanoimprint technology is one of options to produce Surface Relief Grating (SRG) waveguides today. This technology enables fabricating SRG patterns by pressing a mold with the desired SRG patterns into High Refractive Index (HRI) resins, and UV curing, then released the mold from HRI resins. The mold used in this process is known as a master mold, and these master molds are expensive to be used as stamps for production itself directly. Working stamps made by resins, a copy of the master molds, are used repeatedly to prevent damage to the master molds and reduce process costs. In this method, high durability is desirable for the working stamp over repeated cycles. We evaluated the formability and durability of working stamps through repeated using that influences the productivity of SRG waveguides. In this process, we investigated the compatibility between HRI resins (RI = 1.8 and RI = 1.9 respectively) and working stamps by fabricating grating patterns 50 times repeatedly to examine the influence of the material types on the durability of working stamps. The result showed that there are no defects and significant deformation on the patterns of each HRI resins after fabricated repeatedly more than 50 times using one working stamp respectively. This suggests that working stamps have capability to improve the productivity of SRG waveguides.
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