Dr. Robert Kowarsch Profile

Dr. Robert Kowarsch

Area of Expertise:

Optical metrology , Label-free superresolution microscopy , Laser-Doppler vibrometry , Confocal scanning microscopy

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Company Website

Publications (6)

Proceedings Article | 17 September 2018 Presentation

Modeling superresolution reflection microscopy via absorbance modulation (Conference Presentation)

Robert Kowarsch, Claudia Geisler, Alexander Egner, Christian Rembe

Proceedings Volume 10726, 107260V (2018) https://doi.org/10.1117/12.2324481

KEYWORDS: Microscopy, Modulation, Super resolution, Absorbance, Confocal microscopy, Diffraction, Optical lithography, Molecules, Opacity, Dielectrics

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Proceedings Article | 18 August 2018 Paper

Laser-Doppler vibrometry with variable GHz heterodyne carrier via frequency-offset lock

Robert Kowarsch, Christian Rembe

Proceedings Volume 10749, 107490A (2018) https://doi.org/10.1117/12.2324725

KEYWORDS: Heterodyning, Laser Doppler velocimetry, Photodetectors, Semiconductor lasers, Vibrometry, Microscopes, Electronics, Laser sources, Acousto-optics, Optical filters

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Proceedings Article | 26 June 2017 Paper

Speckle-interferometric measurement system of 3D deformation to obtain thickness changes of thin specimen under tensile loads

Robert Kowarsch, Jiajun Zhang, Carmen Sguazzo, Stefan Hartmann, Christian Rembe

Proceedings Volume 10329, 103291O (2017) https://doi.org/10.1117/12.2269988

KEYWORDS: 3D metrology, Phase shifts, Interferometers, Semiconductor lasers, Interferometry, Wavelength tuning, Phase interferometry, Mechanics, Solids, Optical testing, 3D image processing, Digital image correlation

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SPIE Journal Paper | 26 March 2014 Open Access

Optical three-dimensional vibrometer microscope with picometer-resolution in x, y, and z

Christian Rembe, Robert Kowarsch, Wanja Ochs, Alexander Dräbenstedt, Moritz Giesen, Marcus Winter

OE, Vol. 53, Issue 03, 034108, (March 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.3.034108

KEYWORDS: Microscopes, Light scattering, Vibrometry, Interferometers, Motion measurement, Doppler effect, Microelectromechanical systems, Laser scattering, 3D metrology, Optical testing

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Proceedings Article | 13 May 2013 Paper

Optical vibration analysis of MEMS devices with pm-resolution in x, y, and z directions

Moritz Giesen, Robert Kowarsch, Wanja Ochs, Marcus Winter, Christian Rembe

Proceedings Volume 8788, 87881U (2013) https://doi.org/10.1117/12.2019342

KEYWORDS: Microelectromechanical systems, Doppler effect, Vibrometry, Signal detection, Optical testing, 3D metrology, Scattering, Sensors, Heterodyning, Motion measurement

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Proceedings Article | 5 May 2012 Paper

Real-time 3D vibration measurements in microstructures

Robert Kowarsch, Wanja Ochs, Moritz Giesen, Alexander Dräbenstedt, Marcus Winter, Christian Rembe

Proceedings Volume 8430, 84300C (2012) https://doi.org/10.1117/12.922184

KEYWORDS: Doppler effect, Sensors, 3D metrology, Signal detection, Vibrometry, Head, Light scattering, Optical testing, Laser scattering, Scattering

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Showing 5 of 6 publications

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