Mr. Ron Taylor Profile

Ron Taylor

at GLOBALFOUNDRIES Inc

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Author

Publications (3)

Proceedings Article | 27 March 2017 Paper

A study on EUV reticle surface molecular contamination under different storage conditions in a HVM foundry fab

SherJang Singh, Brett Yatzor, Ron Taylor, Obert Wood, Pawitter Mangat

Proceedings Volume 10143, 101431T (2017) https://doi.org/10.1117/12.2258393

KEYWORDS: Reticles, Extreme ultraviolet lithography, Contamination, Atmospheric particles, Extreme ultraviolet, Air contamination, Carbon, Reflectivity, Optical lithography, Pellicles, Ions, Ruthenium

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Proceedings Article | 25 October 2016 Paper

Reticle inspection equipment productivity increase using SEMI specification for reticle and pod management

Ron Taylor, Jack Downey, Jeffrey Wood, Yen-Hung Lin, Bharathi Bugata, Dongsheng Fan, Carl Hess, Mark Wylie

Proceedings Volume 9985, 99850L (2016) https://doi.org/10.1117/12.2241129

KEYWORDS: Reticles, Inspection, Inspection equipment, Factory automation, Manufacturing, High volume manufacturing, Control systems, Image processing, Semiconducting wafers, Roads

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Proceedings Article | 8 October 2014 Paper

Best-practice evaluation-methods for wafer-fab photomask-requalification inspection tools

Chan Seob Cho, Ashish Mungmode, Ron Taylor, David Cho, Hui Peng Koh

Proceedings Volume 9235, 92351I (2014) https://doi.org/10.1117/12.2068466

KEYWORDS: Inspection, Defect detection, Photomasks, Reticles, Particles, Air contamination, Optical proximity correction, Contamination, SRAF, Image analysis

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