CONFERENCE PROCEEDINGS
Advanced Search
Sung Man Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 2 April 2014 Paper
High-precision self-tool CD matching with focus-target assist pattern by computational ways
Sung-Man Kim, Hyun-Chul Kim, Jung-Woo Lee, Young-Seok Kim, Yong-Ho Kim, Sung-Keun Won, Sung-il (Andrew) Kim, Ki-Yeop (Chris) Park, Chang-Hoon Ryu, Qi-Tong Fan, Ki-Ho Baik
Proceedings Volume 9050, 90502X (2014) https://doi.org/10.1117/12.2047272
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Control systems, Photoresist processing, Scanners, Image processing, Finite element methods, Optical proximity correction, Imaging systems, Lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top