Mr. Sachin Deo Profile

Sachin Deo

at Univ of Tennessee

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Author

Publications (3)

Proceedings Article | 10 September 2007 Paper

Length calibration standards for nano-manufacturing

David Joy, Sachin Deo, Brendan Griffin

Proceedings Volume 6648, 664807 (2007) https://doi.org/10.1117/12.735576

KEYWORDS: Scanning electron microscopy, Calibration, Metrology, Electron beam lithography, Semiconducting wafers, Electron beams, Diffraction gratings, Raster graphics, Silicon, Standards development

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Proceedings Article | 5 April 2007 Paper

Magnification calibration standards for sub-100nm metrology

Sachin Deo, David Joy

Proceedings Volume 6518, 65183N (2007) https://doi.org/10.1117/12.711790

KEYWORDS: Calibration, Metrology, Standards development, Scanning electron microscopy, Line edge roughness, Silicon, Electron beam lithography, Hydrogen, Electron beams, Semiconductors

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Proceedings Article | 24 March 2006 Paper

Tools to measure CD-SEM performance

Jihoon Kim, Kiran Jalhadi, Sachin Deo, Soo-Young Lee, David Joy

Proceedings Volume 6152, 61520T (2006) https://doi.org/10.1117/12.650649

KEYWORDS: Zone plates, Image resolution, Spatial resolution, Image analysis, Interference (communication), Fourier transforms, Scanning electron microscopy, Image enhancement, Electron beam lithography, Signal to noise ratio

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