Mr. Saurav Mohanty Profile

Saurav Mohanty

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Publications (2)

Proceedings Article | 21 November 2023 Poster + Paper

A study on EUV patterning with colloidal nanoparticles

Saurav Mohanty, Ethan Flores, Chih-Hao Chang

Proceedings Volume 12750, 1275011 (2023) https://doi.org/10.1117/12.2687727

KEYWORDS: Extreme ultraviolet, Nanoparticles, Extreme ultraviolet lithography, Optical lithography, Photoresist materials, Particles, Nanostructures, Lithography, Light sources, Finite-difference time-domain method

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Proceedings Article | 31 October 2022 Poster

EUV lithography using colloidal nanoparticles

Saurav Mohanty, Kun-Chieh Chien, Vijay A. Premnath, Chih-Hao Chang

Proceedings Volume PC12292, PC122920T (2022) https://doi.org/10.1117/12.2641139

KEYWORDS: Nanoparticles, Extreme ultraviolet lithography, Photoresist materials, Extreme ultraviolet, Silicon, Semiconducting wafers, Nanostructures, Nanolithography, Infrared lasers, Ultrafast phenomena

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