Dr. Sergey A. Gavrilov Profile

Dr. Sergey A. Gavrilov

at National Research Univ of Electronic Technology

SPIE Involvement:

Author

Publications (20)

Proceedings Article | 30 December 2016 Paper

Metal-assisted chemical etching of silicon with different metal films and clusters: a review

O. Pyatilova, S. Gavrilov, A. Sysa, A. Savitskiy, A. Shuliatyev, A. Dudin, A. Pavlov

Proceedings Volume 10224, 1022405 (2016) https://doi.org/10.1117/12.2266862

KEYWORDS: Silicon, Metals, Wet etching, Silicon films, Nanostructuring, Detection and tracking algorithms, Silver, Etching, Nickel, Semiconducting wafers

Read Abstract +

Proceedings Article | 30 December 2016 Paper

Application of porous alumina formed in selenic acid solution for nanostructures investigation via Raman spectroscopy

Y. Nazarkina, S. Gavrilov, A. Polohin, D. Gromov, Y. Shaman

Proceedings Volume 10224, 102240J (2016) https://doi.org/10.1117/12.2267148

KEYWORDS: Raman spectroscopy, Nanostructures, Cadmium sulfide, Luminescence, Matrices, Composites, Nanostructuring, Oxides, Aluminum, Nanomaterials

Read Abstract +

Proceedings Article | 30 December 2016 Paper

Study of morphological characteristic of por-Si formed using metal-assisted chemical etching by BET-method and fractal geometry

Anton Boyko, Olga Pyatilova, Rustam Kalmykov, Dahir Gaev, Sergei Timoshenkov, Sergei Gavrilov

Proceedings Volume 10224, 102240H (2016) https://doi.org/10.1117/12.2267147

KEYWORDS: Fractal analysis, Wet etching, Silicon, Scanning electron microscopy, Adsorption, Detection and tracking algorithms, Solids, Thermodynamics, Etching, Metals

Read Abstract +

Proceedings Article | 30 December 2016 Paper

The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method

S. Dubkov, S. Bulyarskii, A. Pavlov, A. Trifonov, E. Kitsyuk, P. Mierczynski, T. Maniecki, R. Ciesielski, S. Gavrilov, D. Gromov

Proceedings Volume 10224, 102240L (2016) https://doi.org/10.1117/12.2267052

KEYWORDS: Transmission electron microscopy, Nickel, Crystals, Particles, Niobium, Metals, Nanoparticles, Thin films, Raman spectroscopy, Diffraction

Read Abstract +

Proceedings Article | 30 December 2016 Paper

Investigation of the phase formation from nickel coated nanostructured silicon

Yulia Shilyaeva, Olga Pyatilova, Alexandra Yu. Berezkina, Artem Sysa, Alexander Dudin, Dmitry Smirnov, Sergey Gavrilov

Proceedings Volume 10224, 102240E (2016) https://doi.org/10.1117/12.2264593

KEYWORDS: Nickel, Nanostructuring, Silicon, Heat treatments, Chemical analysis, Plating, Diffraction, Statistical analysis, Metals, X-rays

Read Abstract +

Proceedings Article | 18 December 2014 Paper

Reversible and non-reversible changes in nanostructured Si in humid atmosphere

V. Zhigalov, O. Pyatilova, S. Timoshenkov, S. Gavrilov

Proceedings Volume 9440, 94400B (2014) https://doi.org/10.1117/12.2180958

KEYWORDS: Humidity, Silicon, Nanostructuring, Chemisorption, Polishing, Scanning electron microscopy, Atmospheric physics, Etching, Molecules, Semiconducting wafers

Read Abstract +

Proceedings Article | 18 December 2014 Paper

Different methods of forming multicomponent metal sulfide by SILAR-techniques

S. Gavrilov, A. Zheleznyakova, A. Dronov, A. Presnukhina, E. Popova

Proceedings Volume 9440, 94400I (2014) https://doi.org/10.1117/12.2180700

KEYWORDS: Metals, Solar cells, Zinc, Thin film solar cells, Semiconductors, Tin, Thin films, Copper, Ions, Interfaces

Read Abstract +

Proceedings Article | 18 December 2014 Paper

Nanostructured chalcogenide materials for memory switching devices

O. Pyatilova, S. Gavrilov, R. Rozanov, A. Zheleznyakova, A. Belov, V. Shevyakov

Proceedings Volume 9440, 944007 (2014) https://doi.org/10.1117/12.2179474

KEYWORDS: Thin films, Bismuth, Switching, Metals, Thin film deposition, Ions, Chalcogenides, Copper, Scanning electron microscopy, Atomic force microscopy

Read Abstract +

Proceedings Article | 18 December 2014 Paper

Aluminum anodization process modeling approach

Alexey Belov, Maksim Vorobiev, Sergey Gavrilov, Vasiliy Shevyakov

Proceedings Volume 9440, 94400Z (2014) https://doi.org/10.1117/12.2179218

KEYWORDS: Aluminum, Oxides, Interfaces, Ions, 3D modeling, Numerical simulations, Polishing, Oxygen, Metals, Oxidation

Read Abstract +