Ms. Shruti Jambaldinni Profile

Shruti Jambaldinni

at Lam Research Belgium BV

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Improving OPC model accuracy of dry resist for low k1 EUV patterning

Dongbo Xu, Werner Gillijns, Stewart Wu, Shruti Jambaldinni, Benjamin Kam, Anuja De Sliva, Germain Fenger

Proceedings Volume 12954, 129540L (2024) https://doi.org/10.1117/12.3010127

KEYWORDS: SRAF, Printing, Semiconducting wafers, Optical proximity correction, Photoresist processing, Extreme ultraviolet lithography, Calibration, Extreme ultraviolet

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Proceedings Article | 30 April 2023 Presentation

Dry resist patterning readiness towards high-NA EUV lithography

Hyo Seon Suh, Danilo De Simone, Christophe Beral, Mihir Gupta, Nadia Vandenbroeck, Anuja De Silva, Ali Haider, Ching-Chung Huang, Mohand Brouri, Francesco Gullo, Shruti Jambaldinni, Benjamin Kam, Hicham Zaid, Elisseos Verveniotis, Samantha Tan, Tim Weidman, Jengyi Yu, Da Li, Jun Xue, Younghee Lee

Proceedings Volume 12498, 1249803 (2023) https://doi.org/10.1117/12.2661652

KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist processing, Materials processing, Interfaces

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