Dr. Silvia Lenci Profile

Dr. Silvia Lenci

at imec

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Publications (4)

Proceedings Article | 7 August 2023 Presentation

Nanoimprint-based pattern transfer to 300 mm substrates

Matthew Traub, Myriam Willegms, Sundararajan Thirumalai, Steve Smout, Mohamed Asbahi, Bogumila Kutrzeba-Kotowska, Silvia Lenci, Eleonora Storace

Proceedings Volume 12624, 126240E (2023) https://doi.org/10.1117/12.2675915

KEYWORDS: Optical lithography, Semiconducting wafers, Nanoimprint lithography, Metrology, Manufacturing, Flat optics, Etching, Dielectrics, Deep ultraviolet

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Proceedings Article | 1 May 2023 Presentation + Paper

High transfer fidelity via nanoimprint lithography of patterns for bioelectronics applications

P. Güell-Grau, M. Asbahi, S. Smout, M. Willegems, B. Kotowska, M. Traub, S. Lenci, E. Storace, S. Severi

Proceedings Volume 12497, 124970C (2023) https://doi.org/10.1117/12.2657991

KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Critical dimension metrology, Etching, Design and modelling, Fabrication, Scanning electron microscopy, Lithography, Wet etching, Silicon

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Proceedings Article | 16 March 2023 Presentation + Paper

Scalable patterning modules for diffractive optics on 300mm substrates

Matthew Traub, Myriam Willegems, Sundararajan Thirumalai, Steve Smout, Mohamed Asbahi, Bogumila Kutrzeba-Kotowska, Silvia Lenci, Eleonora Storace

Proceedings Volume 12449, 1244904 (2023) https://doi.org/10.1117/12.2649739

KEYWORDS: Semiconducting wafers, Glasses, Optical lithography, Silicon, Silicon nitride, Nanoimprint lithography, Etching, Fabrication, Electron beam lithography, Deep ultraviolet

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Proceedings Article | 17 September 2018 Presentation

Nb2O5 as waveguide material for visible light photonic integrated circuits (Conference Presentation)

Suseendran Jayachandran, Silvia Lenci, Kristof Lodewijks, Tangla David Kongnyuy, Kenny Leyssens, Vasile Paraschiv

Proceedings Volume 10720, 1072009 (2018) https://doi.org/10.1117/12.2320635

KEYWORDS: Waveguides, Photonic integrated circuits, Refractive index, Visible radiation, Titanium dioxide, Atmospheric propagation, Oxides, Oxygen, Light wave propagation, Niobium

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