Dr. Souk Kim Profile

Dr. Souk Kim

at SAMSUNG Electronics Co Ltd

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Author

Publications (7)

Proceedings Article | 10 April 2024 Presentation + Paper

3D gray level index for pattern depth monitoring based on SEM Image

Hyeon Bo Shim, Jaehyung Ahn, Inseok Park, Souk Kim, Younghoon Sohn

Proceedings Volume 12955, 1295511 (2024) https://doi.org/10.1117/12.3010209

KEYWORDS: Scanning electron microscopy, 3D image processing, 3D metrology, Design rules, Critical dimension metrology, Monte Carlo methods, Metrology, Manufacturing

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Proceedings Article | 27 April 2023 Presentation + Paper

Novel depth quantification technique of buried defect for development of non-destructive optical inspection

Min Ho Rim, Jongsok Yi, Jungtaek Lim, Souk Kim, Younghoon Sohn

Proceedings Volume 12496, 124961R (2023) https://doi.org/10.1117/12.2656994

KEYWORDS: Optical inspection, Signal to noise ratio, Nondestructive evaluation, Visualization, Inspection, Geometrical optics, Semiconducting wafers, Light sources and illumination, Image analysis, Design rules

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Proceedings Article | 27 April 2023 Poster + Paper

3D measurement using SEM technology

Younghoon Sohn, JaeHyung Ahn, Inseok Park, Souk Kim, DongHoon Kim

Proceedings Volume 12496, 124963M (2023) https://doi.org/10.1117/12.2657478

KEYWORDS: Single crystal X-ray diffraction, Scanning electron microscopy, Critical dimension metrology, 3D metrology, Electron beams, Semiconducting wafers, Etching, Cadmium, Optical testing, Optical limiting

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Proceedings Article | 27 April 2023 Presentation + Paper

Detection of defective areas and hidden weak patterns in the wafer using massive measurement data

DongHoon Kim, Sungyoon Ryu, Sunhong Jun, Heeyoon Han, Wonjun Choi, Yong-Ju Jeon, Hyun Lee, Souk Kim, Younghoon Sohn

Proceedings Volume 12496, 124961Y (2023) https://doi.org/10.1117/12.2657064

KEYWORDS: Semiconducting wafers, Signal detection, Defect detection, Metrology, Signal processing, Semiconductors, Semiconductor manufacturing, Fourier transforms, Fabrication

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Proceedings Article | 27 April 2023 Poster + Paper

Local depth monitoring using scanning electron microscopy and its verification using atomic force microscopy

Inseok Park, JaeHyung Ahn, Donghyun Lee, Souk Kim, Minho Rim, Younghoon Sohn

Proceedings Volume 12496, 124962L (2023) https://doi.org/10.1117/12.2657848

KEYWORDS: Scanning electron microscopy, Atomic force microscopy, Transmission electron microscopy, Semiconducting wafers, Reliability, Metrology, Signal detection, Semiconductors, Optical transmission, Optical sensing

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Proceedings Article | 26 May 2022 Presentation + Paper

Diversifying the role of MI in semiconductor manufacturing through new technologies and innovations

Younghoon Sohn, Sungyoon Ryu, Jaehyung Ahn, Souk Kim

Proceedings Volume 12053, 120530X (2022) https://doi.org/10.1117/12.2612710

KEYWORDS: Semiconductors, Inspection, Data processing, Semiconductor manufacturing, Scanning electron microscopy, New and emerging technologies, High volume manufacturing

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Proceedings Article | 26 May 2022 Poster + Presentation + Paper

Depth measurement using high-voltage SEM that changes the inclination of the incident beam

JaeHyung Ahn, KwangEun Kim, Souk Kim, Younghoon Sohn

Proceedings Volume 12053, 1205324 (2022) https://doi.org/10.1117/12.2614186

KEYWORDS: Scanning electron microscopy, Tungsten, Electron microscopy, Etching, 3D metrology, Manufacturing, Error analysis

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Showing 5 of 7 publications

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