Mr. Takashi Hiroi Profile

Takashi Hiroi

Researcher at Hitachi Ltd

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Publications (3)

Proceedings Article | 24 May 2004 Paper

Robust and efficient image processing scheme for electron beam LSI wafer pattern inspection

Takashi Hiroi, Munenori Fukunishi

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534662

KEYWORDS: Inspection, Semiconducting wafers, Image processing, Defect detection, Electron beams, Image analysis, Wafer inspection, Defect inspection, Scanning electron microscopy, Imaging systems

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Proceedings Article | 15 July 2003 Paper

In-line e-beam inspection with optimized sampling and newly developed ADC

Masami Ikota, Akihiro Miura, Munenori Fukunishi, Takashi Hiroi, Aritoshi Sugimoto

Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485225

KEYWORDS: Inspection, Particles, Defect inspection, Defect detection, Optical inspection, Semiconducting wafers, Image classification, Manufacturing, Electron beams, Product engineering

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Proceedings Article | 1 December 1991 Paper

Automated visual inspection for LSI wafer patterns using a derivative-polarity comparison algorithm

Shunji Maeda, Takashi Hiroi, Hiroshi Makihira, Hitoshi Kubota

Proceedings Volume 1567, (1991) https://doi.org/10.1117/12.50808

KEYWORDS: Algorithm development, Detection and tracking algorithms, Semiconducting wafers, Inspection, Signal detection, Defect detection, Optical inspection, Digital image processing, Digital signal processing, Wafer-level optics

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