Mr. Tyler Pohlman Profile

Tyler Pohlman

at Univ. of Illinois

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Proceedings Article | 13 June 2022 Poster

Tin removal by annular surface wave plasma antenna in an extreme ultraviolet source

Dren Qerimi, Andrew Herschberg, Parker Hays, Tyler Pohlman, David Ruzic

Proceedings Volume PC12051, PC120510Y (2022) https://doi.org/10.1117/12.2619407

KEYWORDS: Tin, Plasma, Extreme ultraviolet, Antennas, Mirrors, Ions, Hydrogen, Etching, Contamination, Temperature metrology

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Tin contamination of the collector mirror surface remains one of the main issues of EUV sources, directly impacting the availability of the tool. Hydrogen plasma based tin removal processes employ hydrogen radicals and ions to interact with tin deposits to form gaseous tin hydride (SnH 4 ), which can be removed through pumping. An annular surface wave plasma (SWP) source developed at the University of Illinois – Urbana Champaign is integrated into the cone and perimeter of the collection mirror for in-situ tin removal. The SWP is characterized by high ion and radical densities, low electron temperature, and local generation where etching is needed. This method has the potential to significantly reduce downtime and increase mirror lifetime. Radical probe measurements show hydrogen radical densities in the order of 10 13 cm -3 , while Langmuir probe measurements show electron temperatures of up to 4 eV and plasma densities on the order of 10 11-12 cm -3 . The generated ions are essential to the tin cleaning and have sufficiently low energy to cause no damage to the collector capping layer. Tin etch rates of up to 250 nm/min were observed in a variety of experimental conditions, including various powers, pressures, flowrates and temperatures. The high etch rates demonstrated in this study exceed the expected contamination rate of the EUV source.

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