Dr. Vsevolod A. Kolpakov Profile

Dr. Vsevolod A. Kolpakov

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 29 April 2008 Paper

N. Kazanskiy, V. Kolpakov, V. Paranin, M. Polikarpov

Proceedings Volume 7025, 70250H (2008) https://doi.org/10.1117/12.802364

KEYWORDS: Metals, Contamination, Molecules, Dielectrics, Chemical species, Thin films, Copper, Natural surfaces, Interfaces, Silica

Proceedings Article | 10 June 2006 Paper

N. Kazanskiy, V. Kolpakov, S. Kritchevskiy

Proceedings Volume 6260, 62601V (2006) https://doi.org/10.1117/12.683578

KEYWORDS: Plasma, Etching, Molecules, Ions, Cadmium, Oxygen, Particles, Natural surfaces, Dielectrics, Electrons

Proceedings Article | 28 May 2004 Paper

Nikolay Kazanskiy, Vsevolod Kolpakov

Proceedings Volume 5401, (2004) https://doi.org/10.1117/12.562655

KEYWORDS: Etching, Software development, Plasma, Silicon carbide, Plasma etching, Databases, Ions, Silicon, Silica, Diamond

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