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Weiling Lin
at KLA China
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Publications (1)
Proceedings Article | 22 February 2021 Presentation + Paper
Signal weighted overlay optimizer for scatterometry metrology
A. Yagil, R. Dirawi, W. L. Lin, A. Volfman, Y. Men, R. Milo, T. Yaziv, Y. Lamhot
Proceedings Volume 11611, 1161124 (2021) https://doi.org/10.1117/12.2583866
KEYWORDS: Overlay metrology, Metrology, Scatterometry, Principal component analysis, Optical parametric oscillators, Mathematical modeling, Detection and tracking algorithms, Algorithm development
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