Mr. Wim Schollaert Profile

Wim Schollaert

Application Engineer at JSR Micro NV

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Publications (2)

Proceedings Article | 20 March 2015 Paper

A comprehensive approach for micro and multiple bridges mitigation in immersion photolithography

L. D'Urzo, W. Schollaert, X. Buch, H. Stokes, Y. Thouroude

Proceedings Volume 9425, 94251Y (2015) https://doi.org/10.1117/12.2085627

KEYWORDS: Bridges, Standards development, Molecular bridges, Particles, Optical lithography, Line width roughness, Photoresist materials, Polymers, Metals, Lithography

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Proceedings Article | 30 March 2010 Paper

Point-of-use filtration methods to reduce defectivity

Jennifer Braggin, Wim Schoallert, Kenji Hoshiko, Xavier Buch

Proceedings Volume 7639, 763918 (2010) https://doi.org/10.1117/12.846346

KEYWORDS: Semiconducting wafers, Chemistry, Composites, Manufacturing, Photoresist processing, Coating, Particles, Immersion lithography, Digital watermarking, Manufacturing equipment

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